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期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2006, vol.16, no.1 2006, vol.16, no.10 2006, vol.16, no.11 2006, vol.16, no.12 2006, vol.16, no.2 2006, vol.16, no.3
2006, vol.16, no.4 2006, vol.16, no.5 2006, vol.16, no.6 2006, vol.16, no.7 2006, vol.16, no.8 2006, vol.16, no.9

题名作者出版年年卷期
Control of strain gradient in doped poly crystalline silicon carbide films through tailored dopingJingchun Zhang; Roger T. Howe; Roya Maboudian20062006, vol.16, no.10
Monolithic surface micromachined fluidic devices for dielectrophoretic preconcentration and routing of particlesConrad D. James; Murat Okandan; Seethambal S. Mani; Paul G. Galambos; Randy Shul20062006, vol.16, no.10
Fabrication of a micro cryogenic cold stage using MEMS-technologyP. P. P. M. Lerou; G. C. F. Venhorst; C. F. Berends; T. T. Veenstra; M. Blom; J. F. Burger; H. J. M. ter Brake; H. Rogalla20062006, vol.16, no.10
Young's modulus measurement of thin-film materials using micro-cantileversG. J. McShane; M. Boutchich; A. Srikantha Phani; D. F. Moore; T. J. Lu20062006, vol.16, no.10
A multi-ink linear array of nanofountain probesN. Moldovan; K.-H. Kim; H. D. Espinosa20062006, vol.16, no.10
A silicon electrothermal rotational micro motor measuring one cubic millimeterA. Geisberger; D. Kadylak; M. Ellis20062006, vol.16, no.10
A simple approach to convex corner compensation in anisotropic KOH etching on a (100) silicon waferWei Fan; Dacheng Zhang20062006, vol.16, no.10
Laser micromachining of high-aspect-ratio metallic grooves for application to microthermal devicesKwang H. Oh; M. K. Lee; S. H. Jeong20062006, vol.16, no.10
Stamps for nanoimprint lithography fabricated by proton beam writing and nickel electroplatingKambiz Ansari; Jeroen Anton van Kan; Andrew Anthony Bettiol; Frank Watt20062006, vol.16, no.10
AFM-measured surface roughness of SU-8 structures produced by deep X-ray lithographyK. D. Vora; B. Lochel; E. C. Harvey; J. P. Hayes; A. G. Peele20062006, vol.16, no.10
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