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期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2006, vol.16, no.1 2006, vol.16, no.10 2006, vol.16, no.11 2006, vol.16, no.12 2006, vol.16, no.2 2006, vol.16, no.3
2006, vol.16, no.4 2006, vol.16, no.5 2006, vol.16, no.6 2006, vol.16, no.7 2006, vol.16, no.8 2006, vol.16, no.9

题名作者出版年年卷期
Conformal AZ5214-E resist deposition on patterned (100) InP substratesP. Elias; D. Gregusova; J. Martaus; I. Kostic20062006, vol.16, no.2
AFM probes fabricated with masked-maskless combined anisotropic etching and p{sup}+ surface dopingJianqiang Han; Xinxin Li; Haifei Bao; Guomin Zuo; Yuelin Wang; Fei Feng; Zhenyin Yu; Xiaohong Ge20062006, vol.16, no.2
Analysis of out-of-plane thermal microactuatorsAmarendra Atre20062006, vol.16, no.2
An experimental study of micromachining step-mirrors for laser-diode beam shapingF. Z. Fang; Z. Xiong; X. T. Hu20062006, vol.16, no.2
Electrodeposition of hard magnetic CoPtP material and integration into magnetic MEMSL. Vieux-Rochaz; C. Dieppedale; B. Desloges; D. Gamet; C. Barragatti; H. Rostaing; J. Meunier-Carus20062006, vol.16, no.2
Low-loss microelectrodes fabricated using reverse-side exposure for a tunable ferroelectric capacitor applicationYong-Kyu Yoon; J. Stevenson Kenney; Andrew T. Hunt; Mark G. Allen20062006, vol.16, no.2
Design and modeling of a micro-energy harvester using an embedded charge layerS. M. Gracewski; P. D. Funkenbusch; Z. Jia; D. S. Ross; M. D. Potter20062006, vol.16, no.2
A thermal actuator for nanoscale in situ microscopy testing: design and characterizationYong Zhu; Alberto Corigliano; Horacio D. Espinosa20062006, vol.16, no.2
Measurement of residual stress by slot milling with focused ion-beam equipmentN. Sabate; D. Vogel; A. Gollhardt; J. Keller; C. Cane; I. Gracia; J. R. Morante; B. Michel20062006, vol.16, no.2
A molded surface-micromachining and bulk etching release (MOSBE) fabrication platform on (111) Si for MOEMSMingching Wu; Weileun Fang20062006, vol.16, no.2
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