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期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2006, vol.16, no.1 2006, vol.16, no.10 2006, vol.16, no.11 2006, vol.16, no.12 2006, vol.16, no.2 2006, vol.16, no.3
2006, vol.16, no.4 2006, vol.16, no.5 2006, vol.16, no.6 2006, vol.16, no.7 2006, vol.16, no.8 2006, vol.16, no.9

题名作者出版年年卷期
Seedless electroplating on patterned siliconL. D. Vargas Llona; H. V. Jansen; M. C. Elwenspoek20062006, vol.16, no.6
Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM applicationD. M. Brouwer. B. R. de Jong; H. M. J. R. Soemers; J. Van Dijk20062006, vol.16, no.6
LTCC interconnects in microsystemsCristina Rusu; Katrin Persson; Britta Ottosson; Dag Billger20062006, vol.16, no.6
Creating multi-layered structures with freestanding parts in SU-8Frederik Ceyssens; Robert Puers20062006, vol.16, no.6
Nano-ridge fabrication by local oxidation of silicon edges with silicon nitride as a maskJeroen Haneveld; Erwin Berenschot; Pascale Maury; Henri Jansen20062006, vol.16, no.6
Development of cost-effective high-density through-wafer interconnects for 3D microsystemsNicolas Lietaer; Preben Storas; Lars Breivik; Sigurd Moe20062006, vol.16, no.6
Actuated elastomers with rigid vertical electrodesG. K. Lau; J. F. L. Goosen; F. van Keulen; P. J. French; P. M. Sarro20062006, vol.16, no.6
Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factorBaptiste Le Foulgoc; Tarik Bourouina; Olivier Le Traon; Alain Bosseboeuf; Frederic Marty; Cedric Breluzeau; Jean-Paul Grandchamp; Steve Masson20062006, vol.16, no.6
Force feedback linearization for higher-order electromechanical sigma-delta modulatorsYufeng Dong; Michael Kraft; William Redman-White20062006, vol.16, no.6
Comprehensive spring constant modelling of tethered micromechanical platesMaryna Lishchynska; Conor O'Mahony; Orla Slattery; Robert Behan20062006, vol.16, no.6
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