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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2007, vol.17, no.1
2007, vol.17, no.10
2007, vol.17, no.11
2007, vol.17, no.12
2007, vol.17, no.2
2007, vol.17, no.3
2007, vol.17, no.4
2007, vol.17, no.5
2007, vol.17, no.6
2007, vol.17, no.7
2007, vol.17, no.8
2007, vol.17, no.9
题名
作者
出版年
年卷期
A review of MEMS external-cavity tunable lasers
A. Q. Liu; X. M. Zhang
2007
2007, vol.17, no.1
A MEMS-based electrostatically tunable circular microstrip patch antenna
R. Jackson, Jr.; R. Ramadoss
2007
2007, vol.17, no.1
Study of the demolding process-implications for thermal stress, adhesion and friction control
Yuhua Guo; Gang Liu; Yin Xiong; Yangchao Tian
2007
2007, vol.17, no.1
Integration of an RF MEMS resonator with a bulk CMOS process using a low-temperature and dry-release fabrication method
Jing-Feng Gong; Zhi Yong Xiao; Philip C. H. Chan
2007
2007, vol.17, no.1
Fabrication of vertical mirrors using plasma etch and KOH:IPA polishing
R. Agarwal; S. Samson; S. Bhansali
2007
2007, vol.17, no.1
Design and fabrication of a high-sensitive capacitive biaxial microaccelerometer
Yu Liu; Zhiyu Wen; Zhongquan Wen; Liuqiang Zhang; Hongyun Yang
2007
2007, vol.17, no.1
Re-usable quick-release interconnect for characterization of microfluidic systems
Ali Asgar S. Bhagat; Preetha Jothimuthu; Andrea Pais; Ian Papautsky
2007
2007, vol.17, no.1
Application of graphite-based sacrificial layers for fabrication of LTCC (low temperature co-fired ceramic) membranes and micro-channels
H. Birol; T. Maeder; P. Ryser
2007
2007, vol.17, no.1
An analytical model considering the fringing fields for calculating the pull-in voltage of micro curled cantilever beams
Yuh-Chung Hu; Chung-Sheng Wei
2007
2007, vol.17, no.1
Microfabrication and characterization of porous channels for DNA purification
Xing Chen; Da-Fu Cui; Chang-Chun Liu; Hui Li
2007
2007, vol.17, no.1
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