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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
2006
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2007, vol.17, no.1
2007, vol.17, no.10
2007, vol.17, no.11
2007, vol.17, no.12
2007, vol.17, no.2
2007, vol.17, no.3
2007, vol.17, no.4
2007, vol.17, no.5
2007, vol.17, no.6
2007, vol.17, no.7
2007, vol.17, no.8
2007, vol.17, no.9
题名
作者
出版年
年卷期
Geometrical characterization of micro-holes drilled in glass by gravity-feed with spark assisted chemical engraving (SACE)
P. Maillard; B. Despont; H. Bleuler; R. Wuthrich
2007
2007, vol.17, no.7
Determination of pull-off forces of textured silicon surfaces by AFM force curve analysis
Daniel Bachmann; Christofer Hierold
2007
2007, vol.17, no.7
Design and fabrication of dielectric diaphragm pressure sensors for applications to shock wave measurement In air
W. Parkes; V. Djakov; J. S. Barton; S. Watson; W. N. MacPherson; J. T. M. Stevenson; C. C. Dunare
2007
2007, vol.17, no.7
Femtosecond laser direct fabrication of metallic microcantilevers for a micro-corrosion-fatigue test
Xinlin Wang; Peixiang Lu; Nengli Dai; Changrui Liao; Ying Wang; Qiguang Zheng; Xingpeng Guo; Qiang Zhang
2007
2007, vol.17, no.7
Automated assembly of hingeless 90 out-of-plane microstructures
S. H. Tsang; D. Sameoto; I. G. Foulds; R. W. Johnstone; M. Parameswaran
2007
2007, vol.17, no.7
A robust MEMS probe card with vertical guide for a fine pitch test
Bong-Hwan Kim; Hyeon-Cheol Kim; Soon-Don Choi; Kukjin Chun; Jong-Bok Kim; Jong-Hyun Kim
2007
2007, vol.17, no.7
An electrostatic fringing-field actuator (EFFA): application towards a low-complexity thin-film RF-MEMS technology
X. Rottenberg; S. Brebels; P. Ekkels; P. Czarnecki; P. Nolmans; R. P. Mertens; B. Nauwelaers; R. Puers; I. De Wolf; W. De Raedt; H. A. C. Tilmans
2007
2007, vol.17, no.7
Characterization of the performance of capacitive switches activated by mechanical shock
Mohammad I. Younis; Fadi M. Alsaleem; Ronald Miles; Quang Su
2007
2007, vol.17, no.7
Applications of MEMS in power sources and circuits
E. M. Yeatman
2007
2007, vol.17, no.7
An in-plane thermal unimorph using confined polymers
G. K. Lan; T. Chu Duc; J. F. L. Goosen; P. M. Sarro; F. van Keulen
2007
2007, vol.17, no.7
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