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期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2008, vol.18, no.1 2008, vol.18, no.10 2008, vol.18, no.11 2008, vol.18, no.12 2008, vol.18, no.2 2008, vol.18, no.3
2008, vol.18, no.4 2008, vol.18, no.5 2008, vol.18, no.6 2008, vol.18, no.7 2008, vol.18, no.8 2008, vol.18, no.9

题名作者出版年年卷期
Investigation of the electrical contact behaviors in Au-to-Au thin-film contacts for RF MEMS switchesHyouk Kwon; Seong-Soo Jang; Yong-Hee Park; Tae-Sik Kim; Yong-Dae Kim; Hyo-Jin Nam; Young-Chang Joo20082008, vol.18, no.10
Localized electrochemical deposition process improvement by using different anodes and deposition directionsChun-Ying Lee; Chao-Sung Lin; Bo-Ru Lin20082008, vol.18, no.10
M{sup}3EDM: MEMS-enabled micro-electro-discharge machiningChakravarty Reddy Alla Chaitanya; Kenichi Takahata20082008, vol.18, no.10
Direct molding of thermoplastic micro-partsF. Quadrini; L. Santo; F. Trovalusci20082008, vol.18, no.10
The fabrication of a microcolumn for gas separation using poly(dimethylsiloxane) as the structural and functional materialA. Malainou; M. E. Vlachopoulou; R. Triantafyllopoulou; A. Tserepi; S. Chatzandroulis20082008, vol.18, no.10
Dual-beam actuation of piezoelectric AlN RF MEMS switches monolithically integrated with AlN contour-mode resonatorsRashed Mahameed; Nipun Sinha; Marcelo B. Pisani; Gianluca Piazza20082008, vol.18, no.10
Profile control of a borosilicate-glass groove formed by deep reactive ion etchingTeruhisa Akashi; Yasuhiro Yoshimura20082008, vol.18, no.10
A hierarchical structure through imprinting of a polyimide precursor without residual layersI.-Ting Pai; Ing-Chi Leu; Min-Hsiung Hon20082008, vol.18, no.10
A tunable Shack-Hartmann wavefront sensor based on a liquid-filled microlens arrayYu Hongbin; Zhou Guangya; Chau Fook Siong; Lee Feiwen; Wang Shouhua20082008, vol.18, no.10
Non-impact deposition for electrostatic micromanipulation of a conductive particle by a single probeShigeki Saito; Masaki Sonoda20082008, vol.18, no.10
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