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期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006~2025



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2009, vol.19, no.1 2009, vol.19, no.10 2009, vol.19, no.11 2009, vol.19, no.12 2009, vol.19, no.2 2009, vol.19, no.3
2009, vol.19, no.4 2009, vol.19, no.5 2009, vol.19, no.6 2009, vol.19, no.7 2009, vol.19, no.8 2009, vol.19, no.9

题名作者出版年年卷期
Fabrication of polyimide micro/nano-structures based on contact-transfer and mask-embedded lithographyCheng-Yu Chiu; Yung-Chun Lee20092009, vol.19, no.10
Alternative approach in 3D MEMS-IC integration using fluidic self-assembly techniquesY. A. Chapuis; A. Debray; L. Jalabert; H. Fujita20092009, vol.19, no.10
Development of the flow behavior model for 3D scaffold fabrication in the polymer deposition process by a heating methodJong Young Kim; Jung Kyu Park; Sei Kwang Hahn; Tai Hun Kwon; Dong-Woo Cho20092009, vol.19, no.10
Simultaneous measurement of focal length and index of refraction of a microlens using a compound microscopeFranck Chollet; Mohammed Ashraf20092009, vol.19, no.10
Capabilities of ICP-RIE cryogenic dry etching of silicon: review of exemplary microstructuresU. Sokmen; A. Stranz; S. Fundling; H.-H. Wehmann; V. Bandalo; A. Bora; M. Tornow; A. Waag; E. Peiner20092009, vol.19, no.10
Effects of cyclic temperature change on the out-of-plane deformation and diffraction angle of a surface micromachined curved gratingJu-Nan Kuo; Chen-Chieh Liao20092009, vol.19, no.10
An endoscopic capsule robot: a meso-scale engineering case studyClaudio Quaglia; Elisa Buselli; Robert J. Webster III; Pietro Valdastri; Arianna Menciassi; Paolo Dario20092009, vol.19, no.10
Complex three-dimensional structures in Si{1 0 0} using wet bulk micromachiningPrem Pal; Kazuo Sato20092009, vol.19, no.10
Patterning and growth of carbon nanotubes on a highly structured 3D substrate surfaceWang-Shen Su; Chia-Min Lin; Ting-Hsien Chen; Weileun Fang20092009, vol.19, no.10
Microfabrication on a curved surface using 3D microlens array projectionLei Li; Allen Y. Yi20092009, vol.19, no.10
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