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期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2009, vol.19, no.1 2009, vol.19, no.10 2009, vol.19, no.11 2009, vol.19, no.12 2009, vol.19, no.2 2009, vol.19, no.3
2009, vol.19, no.4 2009, vol.19, no.5 2009, vol.19, no.6 2009, vol.19, no.7 2009, vol.19, no.8 2009, vol.19, no.9

题名作者出版年年卷期
Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipmentH. V. Jansen; M. J. de Boer; S. Unnikrishnan; M. C. Louwerse; M. C. Elwenspoek20092009, vol.19, no.3
Electromagnetic energy harvesting from vibrations of multiple frequenciesBin Yang; Chengkuo Lee; Wenfeng Xiang; Jin Xie; Johnny Han He; Rama Krishna Kotlanka; Siew Ping Low; Hanhua Feng20092009, vol.19, no.3
A precision hot embossing mold fabricated by high-resolution powder blasting with polydimethylsiloxane and SU-8 masking technologyT. Lomas; A. Wisitsoraat; F. Chevasuvit; A. Tuantranont20092009, vol.19, no.3
Effect of undercut on the resonant behaviour of silicon nitride cantileversK. Babaei Gavan; E. W. J. M. van der Drift; W. J. Venstra; M. R. Zuiddam; H. S. J. van der Zant20092009, vol.19, no.3
A novel masking method for high aspect ratio penetrating microelectrode arraysR. Bhandari; S. Negi; L. Rieth; R. A. Normann; F. Solzbacher20092009, vol.19, no.3
Development of a soft actuator using a photocurable ionic gelShutaro Saito; Yuichi Katoh; Hisashi Kokubo; Masayoshi Watanabe; Shoji Maruo20092009, vol.19, no.3
Pull-in voltage uniformity analysis of digitally operated micro mirror array with torsional springsYun-Ho Jang; Yong-Kweon Kim20092009, vol.19, no.3
A modified relaxation time Monte Carlo method with a multiple translational temperature model for micronozzle gas flowsXudong Lan20092009, vol.19, no.3
Pull-in and snap-through instabilities in transient deformations of microelectromechanical systemsK. Das; R. C. Batra20092009, vol.19, no.3
Fabrication of copper-based microchannel devices and analysis of their flow and heat transfer characteristicsFanghua Mei; W. A. Phillips; B. Lu; W. J. Meng; S. Guo20092009, vol.19, no.3
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