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期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006~2025



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2006 2007 2008 2009 2010 2011
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2024 2025

2009, vol.19, no.1 2009, vol.19, no.10 2009, vol.19, no.11 2009, vol.19, no.12 2009, vol.19, no.2 2009, vol.19, no.3
2009, vol.19, no.4 2009, vol.19, no.5 2009, vol.19, no.6 2009, vol.19, no.7 2009, vol.19, no.8 2009, vol.19, no.9

题名作者出版年年卷期
An electrostatic 3-phase linear stepper motor fabricated by vertical trench isolation technologyEdin Sarajlic; Christophe Yamahata; Mauricio Cordero; Hiroyuki Fujita20092009, vol.19, no.7
Coded ultrasonic remote control without batteriesC. Gerhardy; K. Burlage; W. K. Schomburg20092009, vol.19, no.7
Low loss HF band SOI wine glass bulk mode capacitive square-plate resonatorJoshua E.-Y. Lee; Jize Yan; Ashwin A. Seshia20092009, vol.19, no.7
A wide-bandwidth and high-sensitivity robust microgyroscopeKorhan Sahin; Emre Sahin; Said Emre Alper; Tayfun Akin20092009, vol.19, no.7
A novel capillary-effect-based solder pump structure and its potential application for through-wafer interconnectionJiebin Gu; W. T. Pike; W. J. Karl20092009, vol.19, no.7
A micro flow sensor from a polymer for gases and liquidsR. Ahrens; K. Schlote-Holubek20092009, vol.19, no.7
An out-of-plane rotational platform with in-plane electrostatic combs made by the MetalMUMPs processJui-Che Tsai; Ren-Jie Lai; Chun-Yi Yin; Dian-Sheng Chen; Po-Fan Yeh20092009, vol.19, no.7
Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recordingS. Herwik; S. Kisban; A. A. A. Aarts; K. Seidl; G. Girardeau; K. Benchenane; M. B. Zugaro; S. I. Wiener; O. Paul; H. P. Neves; P. Ruther20092009, vol.19, no.7
Iridium oxide deposited by pulsed dc-sputtering for stimulation electrodesA. van Ooyen; G. Topalov; G. Ganske; W. Mokwa; U. Schnakenberg20092009, vol.19, no.7
Microfabrication of new microelectrode arrays equipped with a ground surface configuration for focal neural microstimulationL. Rousseau; S. Joucla; G. Lissorgues; B. Yvert20092009, vol.19, no.7
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