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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2009, vol.19, no.1
2009, vol.19, no.10
2009, vol.19, no.11
2009, vol.19, no.12
2009, vol.19, no.2
2009, vol.19, no.3
2009, vol.19, no.4
2009, vol.19, no.5
2009, vol.19, no.6
2009, vol.19, no.7
2009, vol.19, no.8
2009, vol.19, no.9
题名
作者
出版年
年卷期
An electrostatic 3-phase linear stepper motor fabricated by vertical trench isolation technology
Edin Sarajlic; Christophe Yamahata; Mauricio Cordero; Hiroyuki Fujita
2009
2009, vol.19, no.7
Coded ultrasonic remote control without batteries
C. Gerhardy; K. Burlage; W. K. Schomburg
2009
2009, vol.19, no.7
Low loss HF band SOI wine glass bulk mode capacitive square-plate resonator
Joshua E.-Y. Lee; Jize Yan; Ashwin A. Seshia
2009
2009, vol.19, no.7
A wide-bandwidth and high-sensitivity robust microgyroscope
Korhan Sahin; Emre Sahin; Said Emre Alper; Tayfun Akin
2009
2009, vol.19, no.7
A novel capillary-effect-based solder pump structure and its potential application for through-wafer interconnection
Jiebin Gu; W. T. Pike; W. J. Karl
2009
2009, vol.19, no.7
A micro flow sensor from a polymer for gases and liquids
R. Ahrens; K. Schlote-Holubek
2009
2009, vol.19, no.7
An out-of-plane rotational platform with in-plane electrostatic combs made by the MetalMUMPs process
Jui-Che Tsai; Ren-Jie Lai; Chun-Yi Yin; Dian-Sheng Chen; Po-Fan Yeh
2009
2009, vol.19, no.7
Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording
S. Herwik; S. Kisban; A. A. A. Aarts; K. Seidl; G. Girardeau; K. Benchenane; M. B. Zugaro; S. I. Wiener; O. Paul; H. P. Neves; P. Ruther
2009
2009, vol.19, no.7
Iridium oxide deposited by pulsed dc-sputtering for stimulation electrodes
A. van Ooyen; G. Topalov; G. Ganske; W. Mokwa; U. Schnakenberg
2009
2009, vol.19, no.7
Microfabrication of new microelectrode arrays equipped with a ground surface configuration for focal neural microstimulation
L. Rousseau; S. Joucla; G. Lissorgues; B. Yvert
2009
2009, vol.19, no.7
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