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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2010, vol.20, no.1
2010, vol.20, no.10
2010, vol.20, no.11
2010, vol.20, no.12
2010, vol.20, no.2
2010, vol.20, no.3
2010, vol.20, no.4
2010, vol.20, no.5
2010, vol.20, no.6
2010, vol.20, no.7
2010, vol.20, no.8
2010, vol.20, no.9
题名
作者
出版年
年卷期
Deep reactive ion etching of fused silica using a single-coated soft mask layer for bio-analytical applications
Tathagata Ray; Haixin Zhu; Deirdre R. Meldrum
2010
2010, vol.20, no.9
GaAs/AlAs/InGaP heterostructure: a versatile material basis for cantilever designs
Dagmar Gregusova; Robert Kudela; Peter Elias; Jan Soltys; Ivan Kostic; Vladimir Cambel
2010
2010, vol.20, no.9
Novel device for calibration-free flow rate measurements in micro gas chromatographic systems
B. C. Kaanta; H. Chen; X. Zhang
2010
2010, vol.20, no.9
A planar PDMS micropump using in-contact minimized-leakage check valves
Junhui Ni; Fengliang Huang; Bin Wang; Beizhi Li; Qiao Lin
2010
2010, vol.20, no.9
Tuning of a superconducting microwave resonator at 77 K using an integrated micromachined silicon vertical actuator
M. J. Prest; Y. Wang; F. Huang; M. J. Lancaster
2010
2010, vol.20, no.9
Fabrication of nanoscale electrostatic lenses
I. Sinno; A. Sanz-Velasco; S. Kang; H. Jansen; E. Olsson; P. Enoksson; K. Svensson
2010
2010, vol.20, no.9
Investigations into the flame stability limits in a backward step micro scale combustor with premixed methane-air mixtures
Bhupendra Khandelwal; Gur Partap Singh Sahota; Sudarshan Kumar
2010
2010, vol.20, no.9
Improvement of the poly-SiGe electrode contact technology for MEMS
G. Claes; S. Severi; J.-P. Celis; A. Witvrouw
2010
2010, vol.20, no.9
Low-cost carbon thick-film strain sensors for implantable applications
Christian A. Gutierrez; Ellis Meng
2010
2010, vol.20, no.9
Multi-band radio-frequency filters fabricated using polyimide-based membrane transfer bonding technology
Takeshi Matsumura; Masayoshi Esashi; Hiroshi Harada; Shuji Tanaka
2010
2010, vol.20, no.9
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