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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2025
2010, vol.20, no.1
2010, vol.20, no.10
2010, vol.20, no.11
2010, vol.20, no.12
2010, vol.20, no.2
2010, vol.20, no.3
2010, vol.20, no.4
2010, vol.20, no.5
2010, vol.20, no.6
2010, vol.20, no.7
2010, vol.20, no.8
2010, vol.20, no.9
题名
作者
出版年
年卷期
Self-assembly of (sub-)micron particles into supermaterials
Miko Elwenspoek; Leon Abelmann; Erwin Berenschot; Joost van Honschoten; Henri Jansen; Niels Tas
2010
2010, vol.20, no.6
Nanomechanical characterization of adaptive optics components in microprojectors
Manuel Palacio; Bharat Bhushan
2010
2010, vol.20, no.6
Novel 3D modeling methods for virtual fabrication and EDA compatible design of MEMS via parametric libraries
Gerold Schropfer; Gunar Lorenz; Stephane Rouvillois; Stephen Breit
2010
2010, vol.20, no.6
Polymer-based micro flow sensor for dynamical flow measurements in hydraulic systems
R. Ahrens; M. Festa
2010
2010, vol.20, no.6
Measurement setup for detecting the Casimir force between parallel plates separated at a sub-micron distance
M. B. S. Nawazuddin; T. S. J. Lammerink; R. J. Wiegerink; M. C. Elwenspoek
2010
2010, vol.20, no.6
A high aspect ratio SU-8 fabrication technique for hollow microneedles for transdermal drug delivery and blood extraction
Buddhadev Paul Chaudhri; Frederik Ceyssens; Piet De Moor; Chris Van Hoof; Robert Puers
2010
2010, vol.20, no.6
Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications
U. Sokmen; A. Stranz; A. Waag; A. Ababneh; H. Seidel; U. Schmid; E. Peiner
2010
2010, vol.20, no.6
Experimental verification of temperature coefficients of resistance for uniformly doped P-type resistors in SOI
M. Olszacki; C. Maj; M. Al Bahri; J.-C. Marrot; A. Boukabache; P. Pons; A. Napieralski
2010
2010, vol.20, no.6
Zero-level packaging of MEMS in standard CMOS technology
E. Marigo; J. L. Lopez; G. Murillo; F. Torres; J. Giner; A. Uranga; G. Abadal; J. Esteve; N. Barniol
2010
2010, vol.20, no.6
A novel ultra-planar, long-stroke and low-voltage piezoelectric micromirror
Thor Bakke; Andreas Vogl; Oleg Zero; Frode Tyholdt; Ib-Rune Johansen; Dag Wang
2010
2010, vol.20, no.6
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