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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2011, vol.21, no.1
2011, vol.21, no.10
2011, vol.21, no.11
2011, vol.21, no.12
2011, vol.21, no.2
2011, vol.21, no.3
2011, vol.21, no.4
2011, vol.21, no.5
2011, vol.21, no.6
2011, vol.21, no.7
2011, vol.21, no.8
2011, vol.21, no.9
题名
作者
出版年
年卷期
Analysis and wafer-level design of a high-order silicon vibration isolator for resonating MEMS devices
Sang Won Yoon; Sangwoo Lee; Noel C. Perkins; Khalil Najafi
2011
2011, vol.21, no.1
Cantilever-type electrode array-based high-throughput microparticle sorting platform driven by gravitation and negative dielectrophoretic force
Youngho Kim; Junghun Lee; Younggeun Kim; Sang-Mo Shin; Byungkyu Kim
2011
2011, vol.21, no.1
Self-alignment in the stacking of microchips with mist-induced water droplets
Bo Chang; Veikko Sariola; Mirva Jaaskelainen; Quan Zhou
2011
2011, vol.21, no.1
Contact resistance of micromachined electrical switches incorporating a chevron-type bi-stable spring
Punithavelan Nallamuthu; Il-Han Hwang; Dae-Hun Jeong; Seung-Hwan Moon; Seung-Wan Seo; Jong-Hyun Lee
2011
2011, vol.21, no.1
Processing of photosensitive APEX glass structures with smooth and transparent sidewalls
Khalid H. M. Tantawi; Janeczka Oates; Reza Kamali-Sarvestani; Nathan Bergquist; John D. Williams
2011
2011, vol.21, no.1
Hot embossing of plastic microfluidic devices using poly(dimethylsiloxane) molds
Vasiliy N. Goral; Yi-Cheng Hsieh; Odessa N. Petzold; Ronald A. Faris; Po Ki Yuen
2011
2011, vol.21, no.1
Direct writing laser of high aspect ratio epoxy microstructures
V. J. Cadarso; K. Pfeiffer; U. Ostrzinski; J. B. Bureau; G. A. Racine; A. Voigt; G. Gruetzner; J. Brugger
2011
2011, vol.21, no.1
Design and fabrication of micro-hotplates made on a polyimide foil: electrothermal simulation and characterization to achieve power consumption in the low mW range
J. Courbat; M. Canonica; D. Teyssieux; D. Briand; N. F. de Rooij
2011
2011, vol.21, no.1
A multi-step electrochemical etching process for a three-dimensional micro probe array
Yoonji Kim; Sechan Youn; Young-Ho Cho; Hojoon Park; Byeung Gyu Chang; Yong Soo Oh
2011
2011, vol.21, no.1
Parabolic crossed planar polymeric X-ray lenses
V. Nazmov; E. Reznikova; J. Mohr; V. Saile; L. Vincze; B. Vekemans; S. Bohic; A. Somogyi
2011
2011, vol.21, no.1
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