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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2025
2011, vol.21, no.1
2011, vol.21, no.10
2011, vol.21, no.11
2011, vol.21, no.12
2011, vol.21, no.2
2011, vol.21, no.3
2011, vol.21, no.4
2011, vol.21, no.5
2011, vol.21, no.6
2011, vol.21, no.7
2011, vol.21, no.8
2011, vol.21, no.9
题名
作者
出版年
年卷期
A floating 3D silicon microprobe array for neural drug delivery compatible with electrical recording
S. Spieth; O. Brett; K. Seidl; A. A. A. Aarts; M. A. Erismis; S. Herwik; F. Trenkle; S. Tatzner; J. Auber; M. Daub; H. P. Neves; R. Puers; O. Paul; P. Ruther; R. Zengerle
2011
2011, vol.21, no.12
Locomotion response of airborne, ambulatory and aquatic insects to thermal stimulation using piezoceramic microheaters
Karthik Visvanathan; Yogesh B. Gianchandani
2011
2011, vol.21, no.12
Porous inorganic-organic hybrid material by oxygen plasma treatment
Susanna Aura; Ville Jokinen; Mikko Laitinen; Timo Sajavaara; Sami Franssila
2011
2011, vol.21, no.12
Adaptive tuning of a 2DOF controller for robust cell manipulation using IPMC actuators
A. J. McDaid; K. C. Aw; E. Haemmerle; M. Shahinpoor; S. Q. Xie
2011
2011, vol.21, no.12
Digital image correlation of metal nanofilms on SU-8 for flexible electronics and MEMS
Thierry Roland; Steve Arscott; Laurent Sabatier; Lionel Buchaillot; Eric Charkaluk
2011
2011, vol.21, no.12
A new fabrication process for uniform SU-8 thick photoresist structures by simultaneously removing edge bead and air bubbles
Hun Lee; Kangsun Lee; Byungwook Ahn; Jing Xu; Linfeng Xu; Kwang W. Oh
2011
2011, vol.21, no.12
Experimental procurement of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples
M. A. Gosalvez; Prem Pal; N. Ferrando; H. Hida; K. Sato
2011
2011, vol.21, no.12
Reliability assessment of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples
M. A. Gosalvez; Prem Pal; N. Ferrando; K. Sato
2011
2011, vol.21, no.12
Design, microfabrication and characterization of planarized multilayer atom chips with enhanced heat dissipation
Ho-Chiao Chuang; Chung-Wen Weng; Hsiang-Fu Li
2011
2011, vol.21, no.12
Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning
S. M. C. Abdulla; L. J. Kauppinen; M. Dijkstra; M. J. de Boer; E. Berenschot; R. M. de Ridder; G. J. M. Krijnen
2011
2011, vol.21, no.12
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