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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2011, vol.21, no.1
2011, vol.21, no.10
2011, vol.21, no.11
2011, vol.21, no.12
2011, vol.21, no.2
2011, vol.21, no.3
2011, vol.21, no.4
2011, vol.21, no.5
2011, vol.21, no.6
2011, vol.21, no.7
2011, vol.21, no.8
2011, vol.21, no.9
题名
作者
出版年
年卷期
Measurement of the mechanical stability of semiconductor line structures in drying liquids with application to pattern collapse
Daniel Peter; Michael Dalmer; Alfred Lechner; Alexander M. Gigler; Robert W. Stark; Wolfgang Bensch
2011
2011, vol.21, no.2
Mechanics and scaling of thin part assembly at a fluidic interface
Kwang Soon Park; Xugang Xiong; Rajashree Baskaran; Karl F. Bohringer
2011
2011, vol.21, no.2
Non-monotonic pressure dependence of resonant frequencies of microelectromechanical systems supported on squeeze films
Ryan C. Tung; Jin Woo Lee; Hartono Sumali; Arvind Raman
2011
2011, vol.21, no.2
Bidimensional codes recorded on an oxide glass surface using a continuous wave CO_2 laser
M. R. B. Andreeta; L. S. Cunha; L. F. Vales; L. C. Caraschi; R. G. Jasinevicius
2011
2011, vol.21, no.2
MicroChannel formation through Foturan with infrared femtosecond and ultraviolet nanosecond lasers
J. M. Fernandez-Pradas; D. Serrano; J. L. Morenza; P. Serra
2011
2011, vol.21, no.2
A model for squeeze-film damping of perforated MEMS devices in the free molecular regime
Pu Li; Rufu Hu
2011
2011, vol.21, no.2
Quality-factor amplification in piezoelectric MEMS resonators applying an all-electrical feedback loop
T. Manzaneque; J. Hernando-Garcia; A. Ababneh; P. Schwarz; H. Seidel; U. Schmid; J. L. Sanchez-Rojas
2011
2011, vol.21, no.2
Microfluidics in silicon/polymer technology as a cost-efficient alternative to silicon/glass
K. Kalkandjiev; L. Riegger; D. Kosse; M. Welsche; L. Gutzweiler; R. Zengerle; P. Koltay
2011
2011, vol.21, no.2
Surface activation-based nanobonding and interconnection at room temperature
M. M. R. Howlader; A. Yamauchi; T. Suga
2011
2011, vol.21, no.2
SU-8 serial MEMS switch for flexible RF applications
Tzu-Yuan Chao; M. C. Hsu; C.-D. Lin; Y. T. Cheng
2011
2011, vol.21, no.2
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