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期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2011, vol.21, no.1 2011, vol.21, no.10 2011, vol.21, no.11 2011, vol.21, no.12 2011, vol.21, no.2 2011, vol.21, no.3
2011, vol.21, no.4 2011, vol.21, no.5 2011, vol.21, no.6 2011, vol.21, no.7 2011, vol.21, no.8 2011, vol.21, no.9

题名作者出版年年卷期
A diameter 300 μm Bragg reflector for acoustic isolation of resonant micro-actuatorsG。 Rogers20112011, vol.21, no.4
Characterization of CMOS programmable multi-beam blanking arrays as used for programmable multi-beam projection lithography and resistless nanopatterningStefan Eder Kapl; Hans Loeschner; Walter Piller; Martin Witt; Wolfgang Pilz; Florian Letzkus; Michael Jurisch; Mathias Irmscher; Elmar Platzgummer20112011, vol.21, no.4
Silicon sub-micron-gap deep trench Pirani vacuum gauge for operation at atmospheric pressureMasanori Kubota; Yoshio Mita; Masakazu Sugiyama20112011, vol.21, no.4
Micro-structuring of thick NdFeB films using high-power plasma etching for magnetic MEMS applicationYonggang Jiang; Shingo Masaoka; Minora Uehara; Takayuki Fujita; Kohei Higuchi; Kazusuke Maenaka20112011, vol.21, no.4
Analysis of nanoscale mechanical grasping under ambient conditionsHui Xie; Pierre Lambert; Stephane Regnier20112011, vol.21, no.4
Study of lateral mode SOI-MEMS resonators for reduced anchor lossJoshua E.-Y. Lee; Jize Yan; Ashwin A. Seshia20112011, vol.21, no.4
Solvent and substrate effects on inkjet-printed dots and lines of silver nanoparticle colloidsKwon-Yong Shin; Sang-Ho Lee; Je Hoon Oh20112011, vol.21, no.4
Flexible and biocompatible microelectrode arrays fabricated by supersonic cluster beam deposition on SU-8Mattia Marelli; Giorgio Divitini; Cristian Collini; Luca Ravagnan; Gabriele Corbelli; Cristian Ghisleri; Antonella Gianfelice; Cristina Lenardi; Paolo Milani; Leandro Lorenzelli20112011, vol.21, no.4
Tunable wetting properties of patterned silicon microchannels with varied surface free energy based on layer-by-layer nano self-assemblyTao Zhang; Tianhong Cui20112011, vol.21, no.4
Hermetic glass frit packaging in air and vacuum with localized laser joiningN. Lorenz; S. Millar; M. Desmulliez; D. P. Hand20112011, vol.21, no.4
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