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期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2011, vol.21, no.1 2011, vol.21, no.10 2011, vol.21, no.11 2011, vol.21, no.12 2011, vol.21, no.2 2011, vol.21, no.3
2011, vol.21, no.4 2011, vol.21, no.5 2011, vol.21, no.6 2011, vol.21, no.7 2011, vol.21, no.8 2011, vol.21, no.9

题名作者出版年年卷期
A high-performance micro electret power generator based on microball bearingsZhaohui Yang; Jing Wang; Jinwen Zhang20112011, vol.21, no.6
High-Q micromechanical resonators for mass sensing in dissipative mediaKirsi Tappura; Panu Pekko; Heikki Seppa20112011, vol.21, no.6
A numerical experimental approach for characterizing the elastic properties of thin films: application of nanocantileversR. H. Poelma; H. Sadeghian; S. P. M. Noijen; J. J. M. Zaal; G. Q. Zhang20112011, vol.21, no.6
A microfluidic multichannel resistive pulse sensor using frequency division multiplexing for high throughput counting of micro particlesAshish V. Jagtiani; Joan Carletta; Jiang Zhe20112011, vol.21, no.6
Micromachined array-type Mirau interferometer for parallel inspection of MEMSJ. Albero; S. Bargiel; N. Passilly; P. Dannberg; M. Stumpf; U. D. Zeitner; C. Rousselot; K. Gastinger; C. Gorecki20112011, vol.21, no.6
Successful definition of nanowire and porous Si regions of different porosity levels by regular positive photoresist using metal-assisted chemical etchingMohammad Zahedinejad; Mahdi Khaje; Alireza Erfanian; Farshid Raissi20112011, vol.21, no.6
Effect of polymer orientation on pattern replication in a micro-hot embossing process: experiments and numerical simulationR. K. Jena; H. K. Taylor; Y. C. Lam; D. S. Boning; C. Y. Yue20112011, vol.21, no.6
CMOS-compatible fabrication of top-gated field-effect transistor silicon nanowire-based biosensorsPatrick Ginet; Sho Akiyama; Nobuyuki Takama; Hiroyuki Fujita; Beomjoon Kim20112011, vol.21, no.6
A capillary pumping device utilizing super-hydrophobic silicon grassChun-Fei Kung; Chien-Cheng Chang; Chin-Chou Chu20112011, vol.21, no.6
Fabrication of high-aspect-ratio microstructures using dielectrophoresis-electrocapillar force-driven UV-imprintingXiangming Li; Jinyou Shao; Hongmiao Tian; Yucheng Ding; Xiangmeng Li20112011, vol.21, no.6
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