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期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2011, vol.21, no.1 2011, vol.21, no.10 2011, vol.21, no.11 2011, vol.21, no.12 2011, vol.21, no.2 2011, vol.21, no.3
2011, vol.21, no.4 2011, vol.21, no.5 2011, vol.21, no.6 2011, vol.21, no.7 2011, vol.21, no.8 2011, vol.21, no.9

题名作者出版年年卷期
Determining the physical properties of EpoClad negative photoresist for use in MEMS applicationsPieter Gijsenbergh; Kristof Wouters; Kris Vanstreels; Robert Puers20112011, vol.21, no.7
Incorporation of in-plane interconnects to reflow bonding for electrical functionalityB. Mogulkoc; H. V. Jansen; H. J. M. ter Brake; M. C. Elwenspoek20112011, vol.21, no.7
High aspect ratio hydrogenation-assisted lateral etching of (100) silicon substratesM. Kayyalha; J. Naghsh Nilchi; A. Ebrahimi; S. Mohajerzadeh20112011, vol.21, no.7
Monolithically integrated cantilevers with self-aligned tips for wavelength tuning in a photonic crystal cavity-based channel-drop filterS. M. C. Abdulla; L. J. Kauppinen; M. Dijkstra; M. J. de Boer; E. Berenschot; R. M. de Ridder; G. J. M. Krijnen20112011, vol.21, no.7
Three-dimensional etching of silicon substrates using a modified deep reactive ion etching techniqueS. Azimi; A. Sandoughsaz; B. Amirsolaimani; J. Naghsh-Nilchi; S. Mohajerzadeh20112011, vol.21, no.7
On the processing aspects of high performance hybrid backside illuminated CMOS imagersJoeri De Vos; Koen De Munck; Kiki Minoglou; Padmakumar Ramachandra Rao; Mehmet Akif Erismis; Piet De Moor; Deniz Sabuncuoglu Tezcan20112011, vol.21, no.7
A single-mask thermal displacement sensor in MEMSB. Krijnen; R. P. Hogervorst; J. W. van Dijk; J. B. C. Engelen; L. A. Woldering; D. M. Brouwer; L. Abelmann; H. M. J. R. Soemers20112011, vol.21, no.7
Determination of the Young's modulus of pulsed laser deposited epitaxial PZT thin filmsH. Nazeer; M. D. Nguyen; L. A. Woldering; L. Abelmann; G. Rijnders; M. C. Elwenspoek20112011, vol.21, no.7
A surface micromachined thermopile detector array with an interference-based absorberH. Wu; A. Emadi; P. M. Sarro; G. de Graaf; R. F. Wolffenbuttel20112011, vol.21, no.7
Ultrasoft Finemet thin films for magneto-impedance microsensorsJ. Moulin; I. Shahosseini; F. Alves; F. Mazaleyrat20112011, vol.21, no.7
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