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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2011, vol.21, no.1
2011, vol.21, no.10
2011, vol.21, no.11
2011, vol.21, no.12
2011, vol.21, no.2
2011, vol.21, no.3
2011, vol.21, no.4
2011, vol.21, no.5
2011, vol.21, no.6
2011, vol.21, no.7
2011, vol.21, no.8
2011, vol.21, no.9
题名
作者
出版年
年卷期
Non-intrusive measurements of transitional and turbulent convective heat transfer in a rectangular microchannel
V. K. Natrajan; K. T. Christensen
2011
2011, vol.21, no.8
Adhesive wafer bonding using a molded thick benzocyclobutene layer for wafer-level integration of MEMS and LSI
M. Makihata; S. Tanaka; M. Muroyama; S. Matsuzaki; H. Yamada; T. Nakayama; U. Yamaguchi; K. Mima; Y. Nonomura; M. Fujiyoshi; M. Esashi
2011
2011, vol.21, no.8
Three-way flexible cantilever probes for static contact
Fei Wang; Dirch H. Petersen; Helle V. Jensen; Christian Hansen; Dennis Mortensen; Lars Friis; Ole Hansen
2011
2011, vol.21, no.8
Realization of cylindrical submicron shell arrays by diffraction-introduced photolithography
Haiyang Mao; Yulong Zhang; Wengang Wu; Gongchen Sun; Jun Xu
2011
2011, vol.21, no.8
Optimization of submicron deep trench profiles with the STiGer cryoetching process: reduction of defects
T. Tillocher; W. Kafrouni; J. Ladroue; P. Lefaucheux; M. Boufnichel; P. Ranson; R. Dussart
2011
2011, vol.21, no.8
A liquid crystal polymer membrane MEMS sensor for flow rate and flow direction sensing applications
A. G. P. Kottapalli; C. W. Tan; M. Olfatnia; J. M. Miao; G. Barbastathis; M. Triantafyllou
2011
2011, vol.21, no.8
Microcantilever deflection compensation with focused ion beam exposure
Seunghyun Kim; Tim Gustafson; Danny C. Richards; Weisheng Hu; Gregory P. Nordin
2011
2011, vol.21, no.8
Electromechanical resonance behavior of suspended single-walled carbon nanotubes under high bias voltages
Mehmet Aykol; William Branham; Zuwei Liu; Moh R. Amer; I.-Kai Hsu; Rohan Dhall; Shun-Wen Chang; Stephen B. Cronin
2011
2011, vol.21, no.8
Microprism using capillary alignment
Atsushi Takei; Yuta Yoshihata; Isao Shimoyama
2011
2011, vol.21, no.8
Lamb wave resonant pressure micro-sensor utilizing a thin-film aluminium nitride membrane
E. Anderas; I. Katardjiev; V. Yantchev
2011
2011, vol.21, no.8
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