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期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2023

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023

2012, vol.18, no.1 2012, vol.18, no.11 2012, vol.18, no.12 2012, vol.18, no.2 2012, vol.18, no.3 2012, vol.18, no.4
2012, vol.18, no.5 2012, vol.18, no.6 2012, vol.18, no.7/8 2012, vol.18, no.9/10

题名作者出版年年卷期
A review of fabrication processes for vertical comb drivesElse Gallagher; Walied Moussa; Mark McDermott20122012, vol.18, no.4
Detailed investigation of capacitive micromachined ultrasonic transducer design spaceOnursal Onen; Rasim Guldiken20122012, vol.18, no.4
Development of two step carbon dioxide assisted thermal fusion PMMA bonding processChia-Lin Wu; Chen-Chung Li; Chia-Fong Lu; Sen-Yeu Yang20122012, vol.18, no.4
Quality control for deep x-ray lithography (LIGA): a preliminary metrology studyPascal Meyer; James D. Claverley; Richard K. Leach20122012, vol.18, no.4
A method of water pretreatment to improve the thermal bonding rate of PMMA microfluidic chipLiqun Du; Hongling Chang; Mancang Song; Chong Liu20122012, vol.18, no.4
Laser fabrication of micropores and their integration to microfluidic platforms for DNA electrophoresisB. Lerner; M. S. Perez; P. A. Kler; C. L. A. Berli; A. F. Ordonez Arias; F. Sacco; C. Toro; C. A. Rinaldi20122012, vol.18, no.4
Enhancement of PZT embedded swing arm actuator using integrated read/write performance and actuationYu-Cheng Lin; Po-Chien Chou; Stone Cheng20122012, vol.18, no.4
VM-TEST: Mechanical property measurement using electrostatically actuated vertical MEMS test structures fabricated in thick metal layersDarcy T. Haluzan; David M. Klymyshyn; Sven Achenbach; Martin Borner; Jurgen Mohr20122012, vol.18, no.4
A contact lens with integrated micro solar cellsAndrew R. Lingley; Brian P. Otis; Tueng T. Shen; Babak A. Parviz20122012, vol.18, no.4
Replication of precise polymeric microlens arrays combining ultra-precision diamond ball-end milling and micro injection moldingS. Kirchberg; L. Chen; L. Xie; G. Ziegmann; B. Jiang; K. Rickens; O. Riemer20122012, vol.18, no.4
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