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期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2012, vol.22, no.1 2012, vol.22, no.10 2012, vol.22, no.11 2012, vol.22, no.12 2012, vol.22, no.2 2012, vol.22, no.3
2012, vol.22, no.4 2012, vol.22, no.5 2012, vol.22, no.6 2012, vol.22, no.7 2012, vol.22, no.8 2012, vol.22, no.9

题名作者出版年年卷期
Very high aspect ratio through-silicon vias (TSVs) fabricated using automated magnetic assembly of nickel wiresA. C. Fischer; S. J. Bleiker; T. Haraldsson; N. Roxhed; G. Stemme; F. Niklaus20122012, vol.22, no.10
Microwave performance of photoresist-alumina microcomposites for batch fabrication of thick polymer-based dielectric structuresAtabak Rashidian; David M. Klymyshyn; Mohammadreza Tayfeh Aligodarz; Martin Boerner; Jurgen Mohr20122012, vol.22, no.10
Traceable assembly of microparts using optical tweezersJung-Dae Kim; Sun-Uk Hwang; Yong-Gu Lee20122012, vol.22, no.10
Wafer-level hermetic packaging of 3D microsystems with low-temperature Cu-to-Cu thermo-compression bonding and its reliabilityJ. Fan; L. Peng; K. H. Li; C. S. Tan20122012, vol.22, no.10
Lifetime limitations of ohmic, contacting RF MEMS switches with Au, Pt and Ir contact materials due to accumulation of 'friction polymer' on the contactsDavid A. Czaplewski; Christopher D. Nordquist; Christopher W. Dyck; Gary A. Patrizi; Garth M. Kraus; William D. Cowan20122012, vol.22, no.10
Parameter optimization for a high-order band-pass continuous-time sigma-delta modulator MEMS gyroscope using a genetic algorithm approachFang Chen; Honglong Chang; Weizheng Yuan; Reuben Wilcock; Michael Kraft20122012, vol.22, no.10
Fabrication of 200 nm period centimeter area hard x-ray absorption gratings by multilayer depositionS. K. Lynch; C. Liu; N. Y. Morgan; X. Xiao; A. A. Gomella; D. Mazilu; E. E. Bennett; L. Assoufid; F. de Carlo; H. Wen20122012, vol.22, no.10
Focused-ion-beam nanostructuring of Al_2O_3 dielectric layers for photonic applicationsFeridun Ay; Kerstin Worhoff; Rene M. de Ridder; Markus Pollnau20122012, vol.22, no.10
Silicon-based metallic micro grid for electron field emissionJaehong Kim; Seok-Gy Jeon; Jung-Il Kim; Geun-Ju Kim; Duchang Heo; Dong Hoon Shin; Yuning Sun; Cheol Jin Lee20122012, vol.22, no.10
Lateral tunable liquid microlenses for enhanced fluorescence emission in microfluidic channelsYe Liu; Bader Aldalali; Hongrui Jiang20122012, vol.22, no.10
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