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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2012, vol.22, no.1
2012, vol.22, no.10
2012, vol.22, no.11
2012, vol.22, no.12
2012, vol.22, no.2
2012, vol.22, no.3
2012, vol.22, no.4
2012, vol.22, no.5
2012, vol.22, no.6
2012, vol.22, no.7
2012, vol.22, no.8
2012, vol.22, no.9
题名
作者
出版年
年卷期
Fabrication of low pull-in voltage RF MEMS switches on glass substrate in recessed CPW configuration for V-band application
Sharma Jaibir; Krishanapura Nagendra; DasGupta Amitava
2012
2012, vol.22, no.2
Development of a high-sensitivity strain measurement system based on a SH SAW sensor
Haekwan Oh; Keekeun Lee; Kyoungtae Eun; Sung-Hoon Choa; Sang Sik Yang
2012
2012, vol.22, no.2
Micromachined nanofiltration modules for lab-on-a-chip applications
C. Shen; V. R. S. S. Mokkapati; H. T. M. Pham; P. M. Sarro
2012
2012, vol.22, no.2
Voltage-assisted polymer wafer bonding
J. S. Varsanik; J. J. Bernstein
2012
2012, vol.22, no.2
Edge-released, piezoelectric MEMS acoustic transducers in array configuration
Shih-Jui Chen; Youngki Choe; Lukas Baumgartel; Anderson Lin; Eun Sok Kim
2012
2012, vol.22, no.2
Fabrication of CMOS-compatible optical filter arrays using gray-scale lithography
Jing Xiao; Fuchuan Song; Kijeong Han; Sang-Woo Seo
2012
2012, vol.22, no.2
Fabrication of a transparent and self-assembled microlens array using hydrophilic effect and electric field pulling
Hsiang-Chun Wei; Guo-Dung J. Su
2012
2012, vol.22, no.2
Single-crystal-silicon-based microinstrument to study friction and wear at MEMS sidewall interfaces
N. Ansari; W. R. Ashurst
2012
2012, vol.22, no.2
Red blood cell sorting with a multi-bed microfabricated filter
Bradley E. Layton; Bernard Lynch; Thomas Peter; Brian Jamieson
2012
2012, vol.22, no.2
Mechanical and structural properties of RF magnetron sputter-deposited silicon carbide films for MEMS applications
Atul Vir Singh; Sudhir Chandra; Sushil Kumar; G. Bose
2012
2012, vol.22, no.2
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