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期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2012, vol.22, no.1 2012, vol.22, no.10 2012, vol.22, no.11 2012, vol.22, no.12 2012, vol.22, no.2 2012, vol.22, no.3
2012, vol.22, no.4 2012, vol.22, no.5 2012, vol.22, no.6 2012, vol.22, no.7 2012, vol.22, no.8 2012, vol.22, no.9

题名作者出版年年卷期
Capacitive RF MEMS switch dielectric charging and reliability: a critical review with recommendationsW. M. van Spengen20122012, vol.22, no.7
TiO_2 nanoparticles modified polydimethylsiloxane with fast response time and increased dielectric constantG. Ouyang; K. Wang; X. Y. Chen20122012, vol.22, no.7
Fabrication of an array of silicon microscales for the monitoring of chemical processesM. Lacolle; I. R. Johansen; D. Wang; S. Moe; H. Sagberg; S. Clausen; A. Karlsson; D. Akporiaye20122012, vol.22, no.7
Prevention of sidewall redeposition of etched byproducts in the dry Au etch processA. Aydemir; T. Akin20122012, vol.22, no.7
Development of a microsystem based on a microfluidic network to tune and reconfigure RF circuitsS. Pinon; D. L. Diedhiou; A. M. Gue; N. Fabre; G. Prigent; V. Conedera; E. Rius; C. Quendo; B. Potelon; J. F. Favennec; A. Boukabache20122012, vol.22, no.7
Direct integration of carbon nanotubes in Si microstructuresKnut E. Aasmundtveit; Bao Q. Ta; Liwei Lin; Einar Halvorsen; Nils Hoivik20122012, vol.22, no.7
An in-plane cantilever for wall shear stress measurementN. J. Allen; D. B. Sims-Williams; D. Wood20122012, vol.22, no.7
Design and processing of a cost-effective piezoresistive MEMS cantilever sensor for medical and biomedical useI. Clausen; S. T. Moe; A. Vogl20122012, vol.22, no.7
Fabrication process for CMUT arrays with polysilicon electrodes, nanometre precision cavity gaps and through-silicon viasJ. Due-Hansen; K. Midtbo; E. Poppe; A. Summanwar; G. U. Jensen; L. Breivik; D. T. Wang; K. Schjolberg-Henriksen20122012, vol.22, no.7
Improving the signal-to-noise ratio of an ECL-based sensor using ad hoc carbon nanotube electrodesA. Sanginario; M. Giorcelli; A. Tagliaferro; D. Demarchi20122012, vol.22, no.7
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