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期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2013, vol.23, no.1 2013, vol.23, no.10 2013, vol.23, no.11 2013, vol.23, no.12 2013, vol.23, no.2 2013, vol.23, no.3
2013, vol.23, no.4 2013, vol.23, no.5 2013, vol.23, no.6 2013, vol.23, no.8 2013, vol.23, no.9

题名作者出版年年卷期
Fabrication of multi-electrode array platforms for neuronal interfacing with bi-layer lift-off resist sputter depositionYong Hee Kim; Gook Hwa Kim; Nam Seob Baek; Young Hwan Han; Ah-Young Kim; Myung-Ae Chung; Sang-Don Jung20132013, vol.23, no.9
Testing of a single-polarity piezoresistive three-dimensional stress-sensing chipH. H. Gharib; W. A. Moussa20132013, vol.23, no.9
Fabrication of nano-scaled polymer-derived SiAlCN ceramic components using focused ion beamYe Tian; Gang Shao; Xingwei Wang; Linan An20132013, vol.23, no.9
Two complementary ways of thin-metal-film patterning using laser beam interference and direct ablationSimonas Indrisiunas; Bogdan Voisiat; Mindaugas Gedvilas; Gediminas Raciukaitis20132013, vol.23, no.9
Fabrication of nanopillar forests with high infrared absorptance based on rough poly-Si and spacer technologyHaiyang Mao; Yuanjing Chen; Yi Ou; Wen Ou; Jijun Xiong; Chunjuan You; Qiulin Tan; Dapeng Chen20132013, vol.23, no.9
A lateral field excited ZnO film bulk acoustic wave sensor working in viscous environmentsDa Chen; Jingjing Wang; Yan Xu; Dehua Li; Liuyin Zhang; Weihui Liu20132013, vol.23, no.9
Fabrication of highly oriented reduced graphene oxide microbelts array for massive production of sensitive ammonia gas sensorsJia Zhang; Rongfu Zhang; Xiaona Wang; Wei Feng; PingAn Hu; William O'Neill; Zhenlong Wang20132013, vol.23, no.9
Variation of the intrinsic stress gradient in thin aluminum nitride filmsH. Mehner; S. Leopold; M. Hoffmann20132013, vol.23, no.9
Pick-and-place process for sensitivity improvement of the capacitive type CMOS MEMS 2-axis tilt sensorChun-I Chang; Ming-Han Tsai; Yu-Chia Liu; Chih-Ming Sun; Weileun Fang20132013, vol.23, no.9
Ag dot morphologies printed using electrohydrodynamic (EHD) jet printing based on a drop-on-demand (DOD) operationFariza Dian Prasetyo; Hadi Teguh Yudistira; Vu Dat Nguyen; Doyoung Byun20132013, vol.23, no.9
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