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期刊


ISSN0913-5685
刊名電子情報通信学会技術研究報告
参考译名电子信息通信学会技术研究报告：可靠性
收藏年代2000～2023



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2014, vol.114, no.1 2014, vol.114, no.10 2014, vol.114, no.100 2014, vol.114, no.102 2014, vol.114, no.11 2014, vol.114, no.111
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题名作者出版年年卷期
Electrical characteristics of as-deposited HfN gate insulator formed by ECR plasma sputteringNithi ATTHI; Shun-ichiro OHMI20142014, vol.114, no.255
Introduction of Atomically Flattening of Silicon Surface in Shallow Trench Isolation Process TechnologyTetsuya GOTO; Rihito KURODA; Naoya AKAGAWA; Tomoyuki SUWA; Akinobu TERAMOTO; Xiang LI; Toshiki OBARA; Daiki KIMOTO; Shigetoshi SUGAWA; Tadahiro OHMI; Yuki KUMAGAI; Yutaka KAMATA; Katsuhiko SHIBUSAWA20142014, vol.114, no.255
開放型熱処理装置を用いたSi表面平坦化プロセスの検討工藤聡也; 大見俊一郎20142014, vol.114, no.255
［招待講演］IGBTの性能向上と現在の状況寺島知秀20142014, vol.114, no.255
イメージセンサデバイスにおけるイオン注入川崎洋司; 布施玄秀; 佐野信; 大賀絵美; 小池正純; 渡邉一浩; 杉谷道朗20142014, vol.114, no.255
ラジカル窒化法により形成したSi_3N_4/Si界面に形成される組成遷移層に関する研究諏訪智之; 寺本章伸; 須川成利; 大見忠弘20142014, vol.114, no.255
角度分解X線光電子分光法を用いた4H-SiCの初期酸化過程の解明笹子知弥; 山堀俊太; 野平博司20142014, vol.114, no.255
MOCVD法によるGeおよびGe_(1-x)Sn_xのエピタキシャル成長須田耕平; 石原聖也; 木嶋隆浩; 澤本直美; 町田英明; 石川真人; 須藤弘; 大下祥雄; 小椋厚志20142014, vol.114, no.255
［招待講演］電子捕獲履歴現象を利用したナノスケールMOSFETにおける多値ランダムテレグラフノイズの解析土屋敏章20142014, vol.114, no.255
MOSFETにおけるランダムテレグラフノイズを引き起こすトラップ密度の解析に関する研究小原俊樹; 寺本章伸; 黒田理人; 米澤彰浩; 後藤哲也; 諏訪智之; 須川成利; 大見忠弘20142014, vol.114, no.255
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