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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2025
2015, vol.25, no.1
2015, vol.25, no.10
2015, vol.25, no.11
2015, vol.25, no.12
2015, vol.25, no.2
2015, vol.25, no.3
2015, vol.25, no.4
2015, vol.25, no.5
2015, vol.25, no.6
2015, vol.25, no.7
2015, vol.25, no.8
2015, vol.25, no.9
题名
作者
出版年
年卷期
On-chip high density droplet-on-template (DOT) array
Kim, Jitae; Song, Simon
2015
2015, vol.25, no.1
Micro-patterning of porous alumina layers with aligned nanopores
Canonica, Michael D.; Wardle, Brian L.; Lozano, Paulo C.
2015
2015, vol.25, no.1
Bulk vertical micromachining of single-crystal sapphire using inductively coupled plasma etching for x-ray resonant cavities
Chen, P-C; Lin, P-T; Mikolas, D. G.; Tsai, Y-W; Wang, Y-L; Fu, C-C; Chang, S-L
2015
2015, vol.25, no.1
Lift-off of large-scale ultrathin nanomembranes
Miller, Joshua J.; Carter, Robert N.; McNabb, Kelly B.; DesOrmeaux, Jon-Paul S.; Striemer, Christopher C.; Winans, Joshua D.; Gaborski, Thomas R.
2015
2015, vol.25, no.1
Low-loss silicon waveguides with sidewall roughness reduction using a SiO2 hard mask and fluorine-based dry etching
Lee, Dong Ho; Choo, Sung Joong; Jung, Uiseok; Lee, Kyung Woon; Kim, Kwang Woong; Park, Jung Ho
2015
2015, vol.25, no.1
A MEMS based acetone sensor incorporating ZnO nanowires synthesized by wet oxidation of Zn film
Behera, Bhagaban; Chandra, Sudhir
2015
2015, vol.25, no.1
Design and test of reliable high strength ingressive polycrystalline silicon microgripper arrays
Hazra, S. S.; Beuth, J. L.; Myers, G. A.; DelRio, F. W.; de Boer, M. P.
2015
2015, vol.25, no.1
Wide-bandwidth piezoelectric energy harvester with polymeric structure
Rezaeisaray, Mehdi; El Gowini, Mohamed; Sameoto, Dan; Raboud, Don; Moussa, Walied
2015
2015, vol.25, no.1
Manufacture of a 2D optical fiber array coupler with micrometer precision for laser radar applications
Chen, H.; Yu, W.; Wang, T.; Li, H.; Shen, H.; Yao, Y.; Desmulliez, M. P. Y.
2015
2015, vol.25, no.1
A novel method to fabricate parylene-based flexible microfluidic platforms with commercial adhesive tape
Kim, Byung Jun; Lee, Donghee; Lee, Jongho; Yang, Sung
2015
2015, vol.25, no.1
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