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期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2015, vol.25, no.1 2015, vol.25, no.10 2015, vol.25, no.11 2015, vol.25, no.12 2015, vol.25, no.2 2015, vol.25, no.3
2015, vol.25, no.4 2015, vol.25, no.5 2015, vol.25, no.6 2015, vol.25, no.7 2015, vol.25, no.8 2015, vol.25, no.9

题名作者出版年年卷期
Post-CMOS compatible high-throughput fabrication of AIN-based piezoelectric microcantileversPerez-Campos, A.; Iriarte, G. F.; Hernando-Garcia, J.; Calle, F.20152015, vol.25, no.2
Electrotactile display using microfabricated micro-needle arrayKitamura, N.; Chim, J.; Miki, N.20152015, vol.25, no.2
Hemispherical coil electrically small antenna made by stretchable conductors printing and plastic thermoformingWu, Zhigang; Jobs, Magnus; Rydberg, Anders; Hjort, Klas20152015, vol.25, no.2
Determining the thermal expansion coefficient of thin films for a CMOS MEMS process using test cantileversCheng, Chao-Lin; tsai, Ming-Han; Fang, Weileun20152015, vol.25, no.2
Solvent-transfer assisted photolithography of high-density and high-aspect-ratio superhydrophobic micropillar arraysZhou, Shaolin; Hu, Mingjun; Guo, Qiuquan; Xu, Xiangmin; Yang, Jun; Cai, Xiaobing20152015, vol.25, no.2
Slip flow through a converging microchannel: experiments and 3D simulationsVarade, Vijay; Agrawal, Amit; Pradeep, A. M.20152015, vol.25, no.2
A novel MEMS actuator with large lateral stroke driven by Lorentz forceLv, Xingdong; Wei, Weiwei; Mao, Xu; Yang, Jinling; Yang, Fuhua20152015, vol.25, no.2
Pressure effects on the dissipative behavior of nanocrystalline diamond microelectromechanical resonatorsSantos, J. T.; Holz, T.; Fernandes, A. J. S.; Costa, F. M.; Chu, V.; Conde, J. P.20152015, vol.25, no.2
Internal passivation of Al-based microchannel devices by electrochemical anodizationHymel, Paul J.; Guan, D. S.; Mu, Yang; Meng, W. J.; Meng, Andrew C.20152015, vol.25, no.2
Monolithic integrated system with an electrowetting-on-dielectric actuator and a film-bulk-acoustic-resonator sensorZhang, Menglun; Chen, Xuejiao; Wang, Chao; Pang, Wei; Duan, Xuexin; Zhang, Daihua; Zhang, Hao; Cui, Weiwei20152015, vol.25, no.2
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