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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2025
2015, vol.25, no.1
2015, vol.25, no.10
2015, vol.25, no.11
2015, vol.25, no.12
2015, vol.25, no.2
2015, vol.25, no.3
2015, vol.25, no.4
2015, vol.25, no.5
2015, vol.25, no.6
2015, vol.25, no.7
2015, vol.25, no.8
2015, vol.25, no.9
题名
作者
出版年
年卷期
Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT)
Dezest, D.; Thomas, O.; Mathieu, F.; Mazenq, L.; Soyer, C.; Costecalde, J.; Remiens, D.; Deue, J. F.; Nicu, L.
2015
2015, vol.25, no.3
Profile and depth prediction in single-pass and two-pass CO2 laser microchanneling processes
Prakash, Shashi; Kumar, Subrata
2015
2015, vol.25, no.3
Micromachined high-g accelerometers: a review
Narasimhan, V.; Li, H.; Jianmin, M.
2015
2015, vol.25, no.3
Design and fabrication of aluminum nitride Lamb wave resonators towards high figure of merit for intermediate frequency filter applications
Liang, Ji; Zhang, Hongxiang; Zhang, Daihua; Duan, Xuexin; Zhang, Hao; Pang, Wei
2015
2015, vol.25, no.3
TiO2 coated microfluidic devices for recoverable hydrophilic and hydrophobic patterns
Lee, Jin-Hyung; Kim, Sang Kyung; Park, Hyung-Ho; Kim, Tae Song
2015
2015, vol.25, no.3
Evaluating the adhesion of SU-8 thin films using an AlN/Si surface acoustic wave sensor
El Gowini, Mohamed M.; Moussa, Walied A.
2015
2015, vol.25, no.3
Mould insert fabrication of a single-mode fibre connector alignment structure optimized by justified partial metallization
Wissmann, Markus; Barie, Nicole; Guttmann, Markus; Schneider, Marc; Kolew, Alexander; Besser, Heino; Pfleging, Wilhelm; Hofmann, Andreas; Van Erps, Juergen; Beri, Stefano; Watte, Jan
2015
2015, vol.25, no.3
Investigation of multilayer printed circuit board (PCB) film warpage using viscoelastic properties measured by a vibration test
Joo, Sung-Jun; Park, Buhm; Kim, Do-Hyoung; Kwak, Dong-Ok; Song, In-Sang; Park, Junhong; Kim, Hak-Sung
2015
2015, vol.25, no.3
Mechanical behavior analysis on electrostatically actuated rectangular microplates
Li, Zhikang; Zhao, Libo; Jiang, Zhuangde; Ye, Zhiying; Dai, Lu; Zhao, Yulong
2015
2015, vol.25, no.3
Electrothermomechanical modeling of out-of-plane deformation in single-stepped beams actuated by resistive heating
Sohi, Ali Najafi; Nieva, Patricia M.; Khajepour, Amir
2015
2015, vol.25, no.3
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