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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
2006
2007
2008
2009
2010
2011
2012
2013
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2015
2016
2017
2018
2019
2020
2021
2022
2023
2024
2025
2015, vol.25, no.1
2015, vol.25, no.10
2015, vol.25, no.11
2015, vol.25, no.12
2015, vol.25, no.2
2015, vol.25, no.3
2015, vol.25, no.4
2015, vol.25, no.5
2015, vol.25, no.6
2015, vol.25, no.7
2015, vol.25, no.8
2015, vol.25, no.9
题名
作者
出版年
年卷期
Investigation of a zirconia co-fired ceramic calorimetric microsensor for high-temperature flow measurements
Lekholm, Ville; Persson, Anders; Klintberg, Lena; Thornell, Greger
2015
2015, vol.25, no.6
Modulating surface stiffness of polydimethylsiloxane (PDMS) with kiloelectronvolt ion patterning
Liu, Boyin; Fu, Jing
2015
2015, vol.25, no.6
Laterally-actuated inside-driven RF MEMS switches fabricated by a SOG process
Wang, Li-Feng; Han, Lei; Tang, Jie-Ying; Huang, Qing-An
2015
2015, vol.25, no.6
Cavity-enhanced sacrificial layer micromachining for faster release of thin film encapsulated MEMS
Lee, Jae-Wung; Sharma, Jaibir; Merugu, Srinivas; Lin, Zhang Xiao; Singh, Navab; Narducci, Margarita Sofia
2015
2015, vol.25, no.6
Design optimization and performance analysis of deformed optical readout focal plane array
Fu, Jianyu; Shang, Haiping; Shi, Haitao; Li, Zhigang; Yi, Ou; Chen, Dapeng; Zhang, Qingchuan
2015
2015, vol.25, no.6
Improvement of feature-scale profile evolution in a silicon dioxide plasma etching simulator using the level set method
Montoliu, C.; Baer, E.; Cerda, J.; Colom, R. J.
2015
2015, vol.25, no.6
Ink-jet printing technology enables self-aligned mould patterning for electroplating in a single step
Meissner, M. V.; Spengler, N.; Mager, D.; Wang, N.; Kiss, S. Z.; Hoefflin, J.; While, P. T.; Korvink, J. G.
2015
2015, vol.25, no.6
Microfluidic valve array control system integrating a fluid demultiplexer circuit
Kawai, Kentaro; Arima, Kenta; Morita, Mizuho; Shoji, Shuichi
2015
2015, vol.25, no.6
Programmable and self-demolding microstructured molds fabricated from shape-memory polymers
Meier, Tobias; Bur, Julia; Reinhard, Maximilian; Schneider, Marc; Kolew, Alexander; Worgull, Matthias; Hoelscher, Hendrik
2015
2015, vol.25, no.6
Electromagnetic microforging apparatus for low-cost fabrication of molds for microlens arrays
Pribosek, Jaka; Diaci, Janez
2015
2015, vol.25, no.6
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