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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2025
2017, vol.27, no.1
2017, vol.27, no.10
2017, vol.27, no.11
2017, vol.27, no.12
2017, vol.27, no.2
2017, vol.27, no.3
2017, vol.27, no.4
2017, vol.27, no.5
2017, vol.27, no.6
2017, vol.27, no.7
2017, vol.27, no.8
2017, vol.27, no.9
题名
作者
出版年
年卷期
Excitation and time resolved spectroscopy of SAW harmonics up to GHz regime in photolithographed GaAs devices
Rizzato, Silvia; Scigliuzzo, Marco; Chiriaco, Maria Serena; Scarlino, Pasquale; Monteduro, Anna Grazia; Maruccio, Claudio; Tasco, Vittorianna; Maruccio, Giuseppe
2017
2017, vol.27, no.12
UV-LIGA technique for ECF micropumps using back UV exposure and self-alignment
Han, D.; Xia, Y.; Yokota, S.; Kim, J. W.
2017
2017, vol.27, no.12
Conception, fabrication and characterization of a silicon based MEMS inertial switch with a threshold value of 5 g
Zhang, Fengtian; Wang, Chao; Yuan, Mingquan; Tang, Bin; Xiong, Zhuang
2017
2017, vol.27, no.12
New integrated silicon-PDMS process for compliant micro-mechanisms
Haouas, Wissem; Dahmouche, Redwan; Agnus, Joel; Le Fort-Piat, Nadine; Laurent, Guillaume J.
2017
2017, vol.27, no.12
An electromagnetic scanning mirror integrated with blazed grating and angle sensor for a near infrared micro spectrometer
Zhou, Ying; Wen, Quan; Wen, Zhiyu; Huang, Jian; Chang, Fei
2017
2017, vol.27, no.12
Fabrication and characterization of low pressure micro-resistojets with integrated heater and temperature measurement
Guerrieri, Dadui C.; Silva, Marsil A. C.; van Zeijl, Henk; Cervone, Angelo; Gill, Eberhard
2017
2017, vol.27, no.12
Fabrication of pi-type flexible thermoelectric generators using an electrochemical deposition method for thermal energy harvesting applications at room temperature
Nguyen Huu Trung; Nguyen Van Toan; Ono, Takahito
2017
2017, vol.27, no.12
Dual light-activated microfluidic pumps based on an optopiezoelectric composite
Wang, Hsin-Hu; Wu, Ting-Jui; Lin, Shih-Jue; Gu, Jen-Tau; Lee, Chih-Kung; Cheng, I-Chun; Hsu, Yu-Hsiang
2017
2017, vol.27, no.12
Microfabrication of a scanning probe with NV centers in a selectively grown diamond thin film through a xenon difluoride etching process
Zhu, Minjie; Li, Jinhua; Toda, Masaya; Ono, Takahito
2017
2017, vol.27, no.12
Fabrication and evaluation of a protruding Si-based printhead for electrohydrodynamic jet printing
Pan, Yanqiao; Chen, Xinyuan; Zeng, Liangcai; Huang, YongAn; Yin, Zhouping
2017
2017, vol.27, no.12
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