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期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2017, vol.27, no.1 2017, vol.27, no.10 2017, vol.27, no.11 2017, vol.27, no.12 2017, vol.27, no.2 2017, vol.27, no.3
2017, vol.27, no.4 2017, vol.27, no.5 2017, vol.27, no.6 2017, vol.27, no.7 2017, vol.27, no.8 2017, vol.27, no.9

题名作者出版年年卷期
Nanodiamond resonators fabricated on 8 '' Si substrates using adhesive wafer bondingLebedev, V.; Lisec, T.; Yoshikawa, T.; Reusch, M.; Iankov, D.; Giese, C.; Zukauskaite, A.; Cimalla, V.; Ambacher, O.20172017, vol.27, no.6
High-accuracy alignment of the grating pattern along silicon < 1 1 2 > directions using a short rectangular arrayWang, Yu; Liu, Zhengkun; Zheng, Yanchang; Qiu, Keqiang; Hong, Yilin20172017, vol.27, no.6
Tailor-made resealable micro(bio) reactors providing easy integration of in situ sensorsViefhues, Martina; Sun, Shiwen; Valikhani, Donya; Nidetzky, Bernd; Vrouwe, Elwin X.; Mayr, Torsten; Bolivar, Juan M.20172017, vol.27, no.6
Enhancement of electrochemical discharge machining accuracy and surface integrity using side-insulated tool electrode with diamond coatingTang, Weidong; Kang, Xiaoming; Zhao, Wansheng20172017, vol.27, no.6
Analysis of asymmetric resonance response of thermally excited silicon micro-cantilevers for mass-sensitive nanoparticle detectionBertke, Maik; Hamdana, Gerry; Wu, Wenze; Wasisto, Hutomo Suryo; Uhde, Erik; Peiner, Erwin20172017, vol.27, no.6
Design and fabrication of a silicon-based MEMS acceleration switch working lower than 10 gHwang, Jeongki; Ryu, Daeho; Park, Chihyun; Jang, Seung-gyo; Lee, Chung-il; Kim, Yong-Kweon20172017, vol.27, no.6
Modelling of capillary-driven flow for closed paper-based microfluidic channelsSongok, Joel; Toivakka, Martti20172017, vol.27, no.6
Hybrid 3D printing by bridging micro/nano processesYoon, Hae-Sung; Jang, Ki-Hwan; Kim, Eunseob; Lee, Hyun-Taek; Ahn, Sung-Hoon20172017, vol.27, no.6
An optical MEMS accelerometer fabricated using double-sided deep reactive ion etching on silicon-on-insulator waferTeo, Adrian J. T.; Li, Holden; Tan, Say Hwa; Yoon, Yong-Jin20172017, vol.27, no.6
Scattering effects of glass-embedded microstructures by roughness controlled fs-laser micromachiningLo Turco, Sara; Di Donato, Andrea; Criante, Luigino20172017, vol.27, no.6
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