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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2018, vol.28, no.1
2018, vol.28, no.10
2018, vol.28, no.11
2018, vol.28, no.12
2018, vol.28, no.2
2018, vol.28, no.3
2018, vol.28, no.4
2018, vol.28, no.5
2018, vol.28, no.6
2018, vol.28, no.7
2018, vol.28, no.8
2018, vol.28, no.9
题名
作者
出版年
年卷期
Bulk-micromachined, SOI-based half-bridge silicon strain gauges for high pressure applications
Kim, Jin Woong; Kim, Ki Beom; Kim, Joon Hyub; Min, Nam Ki
2018
2018, vol.28, no.12
Microfluidic-based cell handling devices for biochemical applications
Lee, Sanghyun; Kim, Hojin; Lee, Wonhyung; Kim, Joonwon
2018
2018, vol.28, no.12
Closed-loop corrective beam shaping for laser processing of curved surfaces
Heath, Daniel J.; Mackay, Benita S.; Grant-Jacob, James A.; Xie, Yunhui; Oreffo, Richard O. C.; Eason, Robert W.; Mills, Ben
2018
2018, vol.28, no.12
Low-pressure bonding of monolithic SU-8 microfluidic devices
Narayan, Suman; Bae, Kraun; Lehn, Robert; Yadav, Sandeep; Ott, Marcus; Meckel, Tobias; Stark, Robert W.
2018
2018, vol.28, no.12
Micro-thermoelectric devices with large output power fabricated on a multi-channe glass template
Su, Ning; Guo, Shuai; Li, Fu; Liu, Dawei; Li, Bo; Li, Jingfeng; Ji, Muwei
2018
2018, vol.28, no.12
A resolving method of transverse input angular velocity based on Si micromechanical gyro driven by rotating carrier
Zhang, Zengping; Jia, Bin; Zhang, Lijun; Wang, Biao
2018
2018, vol.28, no.12
Fabrication of precise micro-holes on quartz substrates with improved aspect ratio using a constant velocity-feed drilling technique of an ECDM process
Saranya, S.; Sankar, A. Ravi
2018
2018, vol.28, no.12
Development of a bipolar electrostatic chuck module with a beam-array assembly using the multiple etching process
Choi, Seungman; Wakabayashi, Kazuki; Takahashi, Kunio; Saito, Shigeki
2018
2018, vol.28, no.12
Fabrication and characterization of a low-cost interposer with an intact insulation layer and ultra-low TSV leakage current
Luo, Jiangbo; Wang, Guilian; Sun, Yunna; Zhao, Xiaolin; Ding, Guifu
2018
2018, vol.28, no.12
Single-cell electroporation: current trends, applications and future prospects
Kar, Srabani; Loganathan, Mohan; Dey, Koyel; Shinde, Pallavi; Chang, Hwan-You; Nagai, Moeto; Santra, Tuhin Subhra
2018
2018, vol.28, no.12
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