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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2025
2018, vol.28, no.1
2018, vol.28, no.10
2018, vol.28, no.11
2018, vol.28, no.12
2018, vol.28, no.2
2018, vol.28, no.3
2018, vol.28, no.4
2018, vol.28, no.5
2018, vol.28, no.6
2018, vol.28, no.7
2018, vol.28, no.8
2018, vol.28, no.9
题名
作者
出版年
年卷期
Knudsen pump produced via silicon deep RIE, thermal oxidation, and anodic bonding processes for on-chip vacuum pumping
Nguyen Van Toan; Naoki Inomata; Nguyen Huu Trung; Takahito Ono
2018
2018, vol.28, no.5
Surface stress sensor based on MEMS Fabry-Perot interferometer with high wavelength selectivity for label-free biosensing
Takahashi, Toshiaki; Hizawa, Takeshi; Misawa, Nobuo; Taki, Miki; Sawada, Kazuaki; Takahashi, Kazuhiro
2018
2018, vol.28, no.5
Integrating soft sensor systems using conductive thread
Teng, Lijun; Jeronimo, Karina; Wei, Tianqi; Nemitz, Markus P.; Lyu, Geng; Stokes, Adam A.
2018
2018, vol.28, no.5
A square wave is the most efficient and reliable waveform for resonant actuation of micro switches
Ben Sassi, S.; Khater, M. E.; Najar, F.; Abdel-Rahman, E. M.
2018
2018, vol.28, no.5
An experimental study on flow friction and heat transfer of water in sinusoidal wavy silicon microchannels
Huang, Houxue; Wu, Huiying; Zhang, Chi
2018
2018, vol.28, no.5
On traveling-wave field-effect flow control for simultaneous induced-charge electroosmotic pumping and mixing in microfluidics: physical perspectives and theoretical analysis
Liu, Weiyu; Ren, Yukun; Tao, Ye; Li, Yanbo; Wu, Qisheng
2018
2018, vol.28, no.5
Metallized compliant 3D microstructures for dry contact thermal conductance enhancement
Cui, Jin; Wang, Jicheng; Zhong, Yang; Pan, Liang; Weibel, Justin A.
2018
2018, vol.28, no.5
High-aspect-ratio microstructures with versatile slanting angles on silicon by uniform metal-assisted chemical etching
Li, Liyi; Zhang, Cheng; Tuan, Chia-Chi; Chen, Yun; Wong, C-P
2018
2018, vol.28, no.5
Structure and size of ions electrochemically doped in conducting polymer
Kaneto, Keiichi; Hata, Fumito; Uto, Sadahito
2018
2018, vol.28, no.5
Nonlinear dynamic modeling of a V-shaped metal based thermally driven MEMS actuator for RF switches
Bakri-Kassem, Maher; Dhaouadi, Rached; Arabi, Mohamed; Estahbanati, Shahabeddin V.; Abdel-Rahman, Eihab
2018
2018, vol.28, no.5
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