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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2025
2018, vol.28, no.1
2018, vol.28, no.10
2018, vol.28, no.11
2018, vol.28, no.12
2018, vol.28, no.2
2018, vol.28, no.3
2018, vol.28, no.4
2018, vol.28, no.5
2018, vol.28, no.6
2018, vol.28, no.7
2018, vol.28, no.8
2018, vol.28, no.9
题名
作者
出版年
年卷期
High sensitivity MEMS capacitive hydrogen sensor with inverted T-shaped electrode and ring-shaped palladium alloy for fast response and low power consumption
Yamazaki, Hiroaki; Hayashi, Yumi; Masunishi, Kei; Ono, Daiki; Ikehashi, Tamio
2018
2018, vol.28, no.9
Compensation of frequency split by directional lapping in fused quartz micro wineglass resonators
Wang, Yusheng; Asadian, Mohammad H.; Shkel, Andrei M.
2018
2018, vol.28, no.9
Effect of mode order, resonator length, curvature, and electrode coverage on enhancing the performance of biconvex resonators
Siddiqi, Muhammad Wajih Ullah; Tu, Cheng; Lee, Joshua E-Y
2018
2018, vol.28, no.9
A single MEMS resonator for reconfigurable multifunctional logic gates
Tella, Sherif A.; Alcheikh, Nouha; Younis, Mohammad I.
2018
2018, vol.28, no.9
Quality factor determination and improvement of piezoelectric driving multilayer resonator
Du, Qingfa; Pan, Mengchun; Hu, Jiafei; Chen, Dixiang; Tian, Wugang; Sun, Kun; Hu, Jinghua
2018
2018, vol.28, no.9
A novel zero-dead-volume sample loading interface for microfluidic devices: flexible hydraulic reservoir (FHR)
Hatipoglu, Utku; Cetin, Barbaros; Yildirim, Ender
2018
2018, vol.28, no.9
A comprehensive experimental and numerical study on gas flow through microchannels from slip to free-molecular regimes
Srinivasan, K.; Subbarao, P. M., V; Kale, S. R.
2018
2018, vol.28, no.9
Highly-damped nanofiber mesh for ultrasensitive broadband acoustic flow detection
Zhou, Jian; Li, Boxiao; Liu, Jian; Miles, Ronald N.; Jones, Wayne E., Jr.
2018
2018, vol.28, no.9
Theoretical model of glass reflow process for through glass via (TGV) wafer fabrication
Kuang, Yunbin; Xiao, Dingbang; Zhou, Jian; Li, Wenyin; Hou, Zhanqiang; Cui, Hongjuan; Wu, Xuezhong
2018
2018, vol.28, no.9
High-performance low-frequency MEMS energy harvester via partially covering PZT thick film
Li, Guimiao; Yi, Zhiran; Hu, Yili; Liu, Jingquan; Yang, Bin
2018
2018, vol.28, no.9
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