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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2025
2020, vol.30, no.1
2020, vol.30, no.10
2020, vol.30, no.11
2020, vol.30, no.12
2020, vol.30, no.2
2020, vol.30, no.3
2020, vol.30, no.4
2020, vol.30, no.5
2020, vol.30, no.6
2020, vol.30, no.7
2020, vol.30, no.8
2020, vol.30, no.9
题名
作者
出版年
年卷期
Shoulder fillet effects in strength distributions of microelectromechanical system components
DelRio, Frank W.; Boyce, Brad L.; Benzing, Jake T.; Friedman, Lawrence H.; Cook, Robert F.
2020
2020, vol.30, no.12
Fabrication of ultra-high-aspect-ratio nano-walls and nano-structures on silicon substrates
Pournia, Mahsa; Firoozabadi, Seyed Ahmadreza; Fathipour, Morteza; Kolandouz, Mohammadreza
2020
2020, vol.30, no.12
Ultrasonic wireless communication using capacitive micromachined ultrasonic transducers in liquid with OOK digital modulation
Jiang, Weile; Zhao, Yihe; Mao, Qi; Zhao, Libo; Li, Zhikang; Li, Jie; Yang, Ping; Liu, Zichen; Lin, Qijing
2020
2020, vol.30, no.12
Scanning digital oil immersion lithography providing high-speed large area patterning with diffraction limited sub-micron resolution
Jakkinapalli, Aravind; Bhaskar, Arun; Wen, Sy-Bor
2020
2020, vol.30, no.12
Development of mechanically-robust piezoelectric micromachined ultrasonic transducer based on island-shaped monocrystalline PZT thin film partially covered with polyimide
Thao, Pham Ngoc; Yoshida, Shinya; Tanaka, Shuji
2020
2020, vol.30, no.12
Electrochemical detection of baicalein based on a three-dimensional micromixer
Liang, Jie; Yu, Jianfeng; Cheng, Yang; Wu, Yang; Li, Yongliang
2020
2020, vol.30, no.12
A predictive model for electrostatic energy harvesters with impact-based frequency up-conversion
Li, Jinglun; Tichy, John; Borca-Tasciuc, Diana-Andra
2020
2020, vol.30, no.12
An efficient macro model for CMOS-MEMS thermal wind speed sensor
Zhang, Jia-Zhen; Zhou, Zai-Fa; Qin, Ming; Huang, Qing-An
2020
2020, vol.30, no.12
Ultrasensitive detection of antigen-antibody interaction and triglycerides in liquid ambient using polysilicon cantilevers
Chinnamani, M., V; Bhadra, Priyanka; Fidal, V. T.; Gayathri, S.; Chadha, Anju; Bhattacharya, Enakshi
2020
2020, vol.30, no.12
An implantable microelectrode array for chronicin vivoepiretinal stimulation of the rat retina
Yoon, E.; Koo, B.; Wong, J.; Elyahoodayan, S.; Weiland, J. D.; Lee, C. D.; Petrossians, A.; Meng, E.
2020
2020, vol.30, no.12
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