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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2021, vol.31, no.1
2021, vol.31, no.10
2021, vol.31, no.11
2021, vol.31, no.12
2021, vol.31, no.2
2021, vol.31, no.3
2021, vol.31, no.4
2021, vol.31, no.5
2021, vol.31, no.6
2021, vol.31, no.7
2021, vol.31, no.8
2021, vol.31, no.9
题名
作者
出版年
年卷期
Double-objective optimization of electro-thermal (E-T) micro-actuator for fiber switch
Chen, Hao; Wang, Xin-jie; Cao, Yun; Wang, Jiong; Xi, Zhan-wen; Nie, Wei-rong
2021
2021, vol.31, no.4
Bonding methods for chip integration with Parylene devices
Yoo, James; Meng, Ellis
2021
2021, vol.31, no.4
High-accuracy differential resonant pressure sensor with linear fitting method
Han, Xiangguang; Zhao, Libo; Wang, Jiuhong; Wang, Li; Huang, Mimi; Chen, Cuilan; Yang, Ping; Li, Zhikang; Zhu, Nan; Wang, Songli; Yan, Xin; Wang, Yonglu; Wang, Hongyan; Wu, Yongshun; Chen, Yao; Jiang, Zhuangde
2021
2021, vol.31, no.4
Facile fabrication of binary wettability patterned microstructure for microfluidics
Tang, Biao; Wei, Miaoyang; Shao, Wan; Barman, Jitesh; Sun, Hailing; Lu, Longsheng; Groenewold, Jan; Wang, Yao; Zhou, Guofu
2021
2021, vol.31, no.4
Recoverable self-cleaning surface formed by nanostructured microcapsules encapsulating hydrophobic agent
Park, Dong Hyeok; Xuan Don Nguyen; Jeon, Hyeong Jin; Go, Jeung Sang
2021
2021, vol.31, no.4
Limitations on MEMS design resulting from random stress gradient variations in sputtered thin films
Zhu, William Z.; Assylbekova, Meruyert; McGruer, Nicol E.
2021
2021, vol.31, no.4
Shock-free ion transmission in a skimmer-based MEMS mass spectrometer vacuum interface
Wright, S.; Syms, R. R. A.
2021
2021, vol.31, no.4
A dual-frequency piezoelectric micromachined ultrasound transducer array with low inter-element coupling effects
Qin, Feng; Liu, Lifang; Ji, Weiliang; Xing, Zhanqiang; Sun, Xiangyu; Chen, Yu; Du, Yijia
2021
2021, vol.31, no.4
Improved anchor design for flat MEMS structure by suppressing deformation due to buried-oxide stress on silicon-on-insulator wafer
Fujiyoshi, Motohiro; Ozaki, Takashi; Omura, Yoshiteru; Funabashi, Hirofumi; Akashi, Teruhisa; Nonomura, Yutaka
2021
2021, vol.31, no.4
Strain engineering of graphene nano-resonator
More, S. K.; Naik, A. K.
2021
2021, vol.31, no.4
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