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期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2021, vol.31, no.1 2021, vol.31, no.10 2021, vol.31, no.11 2021, vol.31, no.12 2021, vol.31, no.2 2021, vol.31, no.3
2021, vol.31, no.4 2021, vol.31, no.5 2021, vol.31, no.6 2021, vol.31, no.7 2021, vol.31, no.8 2021, vol.31, no.9

题名作者出版年年卷期
Distance sensor with a tunable aperture actuated by thermal expansion of silicon chevron beamsHong, Chong Ho; Kim, Hyeon Cheol; Jatmiko, Wisnu; Kurnianingsih; Chun, Kukjin; Park, Byung-Gook20212021, vol.31, no.6
Design, analysis and fabrication of the CPW resonator loaded by DGS and MEMS capacitorsHan, Ke; Liu, Yibin; Guo, Xubing; Jiang, Zhuoxi; Ye, Nijun; Wang, Peiming20212021, vol.31, no.6
Conventional surface micromachining process for the fabrication of a linear optical phased array based on piston micromirrorsMohammad, Tarek; He, Siyuan; Ben Mrad, Ridha20212021, vol.31, no.6
Design, modeling and experimental validation of a micro cantilever beam with an electro-controllable twisting abilitySu, Xiaoyu; Ren, Zhongjing; Pan, Quan; Lu, Ming; Camino, Fernando; Shi, Yong20212021, vol.31, no.6
Non-intrusive DC voltage measurement based on resonant electric field microsensorsYang, Pengfei; Wen, Xiaolong; Chu, Zhaozhi; Ni, Xiaoming; Peng, Chunrong20212021, vol.31, no.6
Enhancing the performance of dielectric elastomer actuators through the approach of distributed electrode array with fractal interconnects architectureBurugupally, Sindhu Preetham; Koppolu, Bhargav; Danesh, Negar; Lee, Yongkuk; Indeewari, Vidisha; Li, Bin20212021, vol.31, no.6
Bandwidth and noise analysis of high-Q MEMS gyroscope under force rebalance closed-loop controlBu, Feng; Fan, Bo; Xu, Dacheng; Guo, Shuwen; Zhao, Heming20212021, vol.31, no.6
Micro-burrs in machining original molds of an optical functional film with a triangular pyramidal textureLi, Huang; Xu, Zhilong20212021, vol.31, no.6
Application of the evolutionary kinetic Monte Carlo method for the simulation of anisotropic wet etching of sapphireWu, Guorong; Xing, Yan; Chen, Ye; Zhou, Zai-Fa20212021, vol.31, no.6
Micromachining of polymers using atmospheric pressure inductively coupled helium plasma localized by a scanning nanopipette probe microscopeToda, Shun; Nakazawa, Kenta; Ogino, Akihisa; Shimomura, Masaru; Iwata, Futoshi20212021, vol.31, no.6
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