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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2023, vol.33, no.1
2023, vol.33, no.10
2023, vol.33, no.11
2023, vol.33, no.12
2023, vol.33, no.2
2023, vol.33, no.3
2023, vol.33, no.4
2023, vol.33, no.5
2023, vol.33, no.6
2023, vol.33, no.7
2023, vol.33, no.8
2023, vol.33, no.9
题名
作者
出版年
年卷期
Investigation on anchor and base design for aluminum nitride flexural mode resonators
Yuan, Yi; Yang, Qingrui; Li, Haolin; Shi, Shuai; Niu, Pengfei; Sun, Chongling; Liu, Bohua; Zhang, Menglun; Pang, Wei
2023
2023, vol.33, no.8
A low-cost fabrication method for high aspect ratio nano-channels by near-field UV exposure and thermal nanoimprinting
Zhang, Wenlei; Yin, Zhifu; Sun, Lei
2023
2023, vol.33, no.8
In-situ measurement of anisotropic Young's modulus in fused deposition modeling printed cantilevers
Tekin, Engincan; cagmel, Mehmet; Aydin, Can Ozan; Ferhanoglu, Onur; Toy, Muhammed Fatih
2023
2023, vol.33, no.8
Ultra-small high-temperature pressure sensor chips fabricated in single-layer (111) SOI wafers
Li, Peng; Li, Wei; Chen, Changnan; Sun, Ke; Liu, Min; Ni, Zao; Li, Xinxin; Wang, Jiachou
2023
2023, vol.33, no.8
Investigating capacitive flexible tactile sensor with a wide measuring range using PVDF and conductive sponge
Dong, Yukun; Yao, Tao; Lu, Haiyang; Wang, Zhihua
2023
2023, vol.33, no.8
Xurography as a tool for fabrication of microfluidic devices
Shahriari, Shadi; Patel, Vinay; Selvaganapathy, P. Ravi
2023
2023, vol.33, no.8
Fabrication of low-cost MEMS microfluidic devices using metal embossing technique on glass for lab-on-chip applications
Madhankumar, P.; Sujatha, L.; Sundar, R.; Viswanadam, Gautham
2023
2023, vol.33, no.8
High-Q terahertz bandstop filter via cuboid frame structure
Li, Tong; Wang, Zhenlong; Li, Songlin; Li, Yang; Yang, Xiaotao; Zhang, Jia
2023
2023, vol.33, no.8
A novel approach to determining the hydrodynamic resistance of droplets in microchannels using active control and grey-box system identification
Hebert, Marie; Huissoon, Jan P.; Ren, Carolyn L.
2023
2023, vol.33, no.8
A flexible and highly sensitive capacitive pressure sensor with fast response based on a hierarchically micro-structured PDMS dielectric layer
Li, Jiamin; Zhang, Jie; Qin, Lei; Lv, Luyu; Zhang, Yanting; Dhakal, Rajendra; Li, Xiao; Liu, Tian; Li, Yuanyue; Yao, Zhao; Liu, Tianxiang
2023
2023, vol.33, no.8
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