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期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006~2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2024, vol.34, no.1 2024, vol.34, no.10 2024, vol.34, no.11 2024, vol.34, no.12 2024, vol.34, no.2 2024, vol.34, no.3
2024, vol.34, no.4 2024, vol.34, no.5 2024, vol.34, no.6 2024, vol.34, no.7 2024, vol.34, no.8 2024, vol.34, no.9

题名作者出版年年卷期
Characteristics of an antistatic semiconductor bridge based on micro/nano processing techniquesLei Wang; Bin Zhou; Yuren Tao; Jun Wang20242024, vol.34, no.12
Aspect ratio-dependent etching in silicon using XeF_2: experimental investigation and comparative analysis with dry etching methodsBaptiste Baradel; Olivier Leon; Fabien Mery; Philippe Combette; Alain Giani20242024, vol.34, no.12
Modeling and characterization of AlN-Based piezoelectric micromachined ultrasonic transducersRomain Liechti; Francois Blard; Jean-Remi Chatroux; Jean-Claude Bastien; Aude Lefevre; Helene Lhermet; Bruno Fain20242024, vol.34, no.12
High-refractive-index glass device fabricated by room temperature bondingKoki Yamamoto; Yuri Ito; Nobuyuki Tanaka; Yo Tanaka; Nobutoshi Ota20242024, vol.34, no.12
Protein capture performance of microfluidic system: effects of a super hydrophilic coatingKuan-Chung Lu; Chun-Wei Chen; Kuan-Yu Huang; Yu-Sheng Hsiao; Pak-Man Yiu; Meng-Yi Bai; Jinn P Chu20242024, vol.34, no.12