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期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2024, vol.34, no.1 2024, vol.34, no.10 2024, vol.34, no.11 2024, vol.34, no.12 2024, vol.34, no.2 2024, vol.34, no.3
2024, vol.34, no.4 2024, vol.34, no.5 2024, vol.34, no.6 2024, vol.34, no.7 2024, vol.34, no.8 2024, vol.34, no.9

题名作者出版年年卷期
Design and fabrication of a sensors-integrated silicon electrode for gap status monitoring in micro electrochemical machiningYulan Zhu; Guodong Liu; Yong Li; Hao Tong20242024, vol.34, no.4
Innovating in-situ characterization: a comprehensive measurement system for measuring the ZT and the contact resistance of vertical thermolegs exploiting the vertical transfer length methodNegin Sherkat; Athira Kattiparambil Sivaprasad; Uwe Pelz; Peter Woias20242024, vol.34, no.4
Wafer-scale silicon microfabrication technology toward realization of low-cost sub-THz waveguide devicesXinghai Zhao; Peng Wu; Fei Liu20242024, vol.34, no.4
Manufacturing and characterization of CMOS-MEMS magnetic field microsensors with isolated cavitiesChing-Liang Dai; Zhang-Li Zhu; Chun-Yi Chang; Cheng-Chih Hsu20242024, vol.34, no.4
An SOI-based post-fabrication process for compliant MEMS devicesYongcun Hao; Yanlong Wang; Yonghao Liu; Weizheng Yuan; Honglong Chang20242024, vol.34, no.4
MEMS highly sensitive and large-area force plate for total ground reaction force measurement of running antHidetoshi Takahashi; Sumihiro Kohyama; Tomoyuki Takahata; Isao Shimoyama20242024, vol.34, no.4
Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO_3/SiO_2/Si multilayer structureCheng Tu; Ting-yang Zhang; Zhuo Zhang; Qin-wen Huang; Xiao-sheng Zhang20242024, vol.34, no.4
Reflective x-ray masks for x-ray lithographyV S Chumak; S Peredkov; A Yu Devizenko; I A Kopylets; Yu P Pershyn20242024, vol.34, no.4
Preparation of robust superhydrophobic surface on PET substrate using Box-Behnken design and facile sanding method with PTFE powderXin Wang; Tao Wang; Jie Sheng; Ziting Wang; Weizhi Yang; Meng Li; Liping Shi20242024, vol.34, no.4
Study on the mechanism of glass-SiC-glass anodic bonding processXiao Cheng; Lifang Hu; Wei Liu; Zhao Chou; Weijie Jia; Wenjin Mu20242024, vol.34, no.4
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