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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
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2024, vol.34, no.1
2024, vol.34, no.10
2024, vol.34, no.11
2024, vol.34, no.12
2024, vol.34, no.2
2024, vol.34, no.3
2024, vol.34, no.4
2024, vol.34, no.5
2024, vol.34, no.6
2024, vol.34, no.7
2024, vol.34, no.8
2024, vol.34, no.9
题名
作者
出版年
年卷期
Inverse design of electromagnetic metamaterials: from iterative to deep learning-based methods
Chen Ma; Zhenyu Wang; Hui Zhang; Fengyuan Yang; Jianlin Chen; Qinghua Ren; Yiming Ma; Nan Wang
2024
2024, vol.34, no.5
Development of a novel monolithic compliant Lorentz-force-driven XY nanopositioning system
Xu Yang; Xin Liu; Yilong Zhu; Feng Qiao; Shizhen Li; Zhiwei Zhu; Limin Zhu
2024
2024, vol.34, no.5
Theoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures
Wenhao Chen; Huahuang Luo; Hadi Tavakkoli; Mingzheng Duan; Wibool Piyawattanametha; Yi-Kuen Lee
2024
2024, vol.34, no.5
Experimental investigation of micro-machining of borosilicate glass using an ultrasonic assisted rotary electrochemical discharge machining (UA-RECDM) process
Sahil Grover; S K Mangal; Sarbjit Singh; Manpreet Singh; Viveksheel Rajput; Shubham Sharma; Abhinav Kumar; Mohamed Abbas
2024
2024, vol.34, no.5
A novel plating bath device for reducing surface copper thickness and improving wafer-scale uniformity
Guoxian Zeng; Chi Zhang; Kai Niu; Fuliang Wang; Hu He
2024
2024, vol.34, no.5
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