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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2025
2025, vol.35, no.1
2025, vol.35, no.2
2025, vol.35, no.3
题名
作者
出版年
年卷期
A rapid method for fabricating and replicating microlens array structures
Chung-Min Chao; Hsiang-Yi Hsieh; Yempati Nagarjuna
2025
2025, vol.35, no.2
Physics-guided machine-learning enhanced electrostatic actuated method for in-situ measurement of Young's modulus
Zhi-peng Liang; Lin-Feng Zhao; Zai-Fa Zhou; Qing-An Huang
2025
2025, vol.35, no.2
Residual stress chevron preloading amplifier for large-stroke stiffness reduction of silicon flexure mechanisms
Loic Tissot-Daguette; Florent Cosandier; Quentin Gubler; Yves Petremand; Michel Despont; Simon Henein
2025
2025, vol.35, no.2
Quadrant kirigami-type electrothermal MEMS actuator with multi-degree-of-freedom morphing capability
Tomoya Tsutsui; Yoshihiro Taguchi; Masaaki Hashimoto
2025
2025, vol.35, no.2
Wafer-level chip-scale packaging of MEMS environmental sensors by functionalized porous PowderMEMS micro-filters
Ole Behrmann; Niklas Kyoushi; Mani Teja Bodduluri; Thomas Lisec; Stefan Schroder; Bjorn Gojdka
2025
2025, vol.35, no.2
Macro-model extraction and system-level simulation of a thermopile-based MEMS vacuum sensor
Yutian Lv; Zaifa Zhou; Jianyu Fu; Yixuan Li
2025
2025, vol.35, no.2
Alignment-free solvent-enabled automatic packaging for thermoplastic microfluidics
Xiang Pan; Zecong Fang; Pin Lv; Tingrui Pan
2025
2025, vol.35, no.2
Biocompatible all carbon hollow microneedles for effective transdermal delivery
Magnolia Roy; Monojit Mondal; Sudipta Ghosh; Pooja Lahiri; Tarun Kanti Bhattacharyya
2025
2025, vol.35, no.2
The radial point interpolation method (RPIM) for analyzing a V-shaped electrothermal actuator
Chen Hao; Xiaoyu Kong; Sun Xiang Dong; Chen Meng Xu; Yuan Haiyang
2025
2025, vol.35, no.2
Study on the cause of pore defects processed by focused ion beam milling on high roughness surface
Yuqingyun Du; Xianshan Dong; Junfeng Xiao; Yu Wu; Xuefang Wang; Jianfeng Xu
2025
2025, vol.35, no.2
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