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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

1998, vol.7, no.1 1998, vol.7, no.2

题名作者出版年年卷期
A contamination-free microstructure in a humid environment by means of a combination of hydrophilic and hydrophobic surfacesT. Abe19981998, vol.7, no.1
A high-Tc superconductor bolometer on a silicon nitride membraneS. Sanchez; M. Elwenspoek; Chengqun Gui; J. M. E. de Nivelle; R. de Vries; P. A. J. de Korte19981998, vol.7, no.1
An electrostatic lower stator axial-gap polysilicon wobble motor Part I: design and modelingR. Legtenberg; E. Berenschot; J. van Baar; M. Elwenspoek19981998, vol.7, no.1
An electrostatic lower stator axial-gap polysilicon wobble motor Part II: fabrication and performanceR. Legtenberg; E. Berenschot; J. van Baar; M. Elwenspoek19981998, vol.7, no.1
CMOS interface circuitry for a low-voltage micromachined tunneling accelerometerChingwen Yeh; K. Najafi19981998, vol.7, no.1
Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioningM. -H. Kiang; O. Solgaard; K. Y. Lau; R. S. Muller19981998, vol.7, no.1
Elimination of extra spring effect at the step-up anchor of surface-micromachined structureJ. J. -Y. Gill; L. V. Ngo; P. R. Nelson; C. -J. "CJ" Kim19981998, vol.7, no.1
Impact of high-thermal budget anneals on polysilicon as a micromechanical materialY. B. Gianchandani; M. Shinn; K. Najafi19981998, vol.7, no.1
Investigation of high-temperature degradation of platinum thin films with an in situ resistance measurement apparatusS. L. Firebaugh; K. F. Jensen; M. A. Schmidt19981998, vol.7, no.1
Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storageB. W. Chui; T. D. Stowe; Y. S. Ju; K. E. Goodson; T. W. Kenny; H. J. Mamin; B. D. Terris19981998, vol.7, no.1
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