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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2000, vol.9, no.1 2000, vol.9, no.2 2000, vol.9, no.3 2000, vol.9, no.4

题名作者出版年年卷期
A low-power micromachined MOSFET gas sensorDanick Briand; Bart van der Schoot; Nicolaas F. de Rooij; Hans Sundgren; Ingemar Lundstrom20002000, vol.9, no.3
A microfabricated electrochemical actuator for large displacementsTom Stanczyk; B. Ilic; Peter J. Hesketh; James G. Boyd, IV20002000, vol.9, no.3
A microfabricated inductively coupled plasma generatorJeffrey A. Hopwood20002000, vol.9, no.3
A micromachined piezoelectric tactile sensor for an endoscopic grasper - theory, fabrication and experimentsJ. Dargahi; M. Parameswaran; S. Payandeh20002000, vol.9, no.3
An integrated liquid mixer/valveJoel Voldman; Martha L. Gray; Martin A. Schmidt20002000, vol.9, no.3
Analysis of partly corrugated rectangular diaphragms using the Rayleigh-Ritz methodByung Chai Lee; Eun Sok Kim20002000, vol.9, no.3
Copper-encapsulated silicon micromachined structuresJ. -L. Andrew Yeh; Hongrui Jiang; Hercules P. Neves; Norman C. Tien20002000, vol.9, no.3
Effect of support compliance and residual stress on the shape of doubly supported surface-micromachined beamsMauro J. Kobrinsky; Erik R. Deutsch; Stephen D. Senturia20002000, vol.9, no.3
Electronically probed measurements of MEMS geometriesRaj K. Gupta20002000, vol.9, no.3
Electrostatic micromechanical actuator with extended range of travelEdward K. Chan; Robert W. Dutton20002000, vol.9, no.3
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