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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2003, vol.12, no.1 2003, vol.12, no.2 2003, vol.12, no.3 2003, vol.12, no.4 2003, vol.12, no.5 2003, vol.12, no.6

题名作者出版年年卷期
Surface tension-powered self-assembly of microstructures - the state-of-the-artRichard R. A. Syms; Eric M. Yeatman; Victor M. Bright; George M. Whitesides20032003, vol.12, no.4
Microfabrication using one-step LPCVD porous polysilicon filmsGeorge M. Dougherty; Timothy D. Sands; Albert P. Pisano20032003, vol.12, no.4
Thermokinetic actuation for batch assembly of microscale hinged structuresVille Kaajakari; Amit Lal20032003, vol.12, no.4
Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometersLi-Peng Wang; Richard A. Wolf; Yu Wang; Ken K. Deng; Lichun Zou; Robert J. Davis; Susan Trolier-McKinstry20032003, vol.12, no.4
Vertical comb array microactuatorsArjun Selvakumar; Khalil Najafi20032003, vol.12, no.4
A CMOS-MEMS mirror with curled-hinge comb drivesHuikai Xie; Yingtian Pan; Gary K. Fedder20032003, vol.12, no.4
Self-aligned vertical electrostatic combdrives for micromirror actuationUma Krishnamoorthy; Daesung Lee; Olav Solgaard20032003, vol.12, no.4
Arrays of monocrystalline silicon micromirrors fabricated using CMOS compatible transfer bondingFrank Niklaus; Sjoerd Haasl; Goran Stemme20032003, vol.12, no.4
Silicon micro XY-stage with a large area shuttle and No-etching holes for SPM-based data storageChe-Heung Kim; Hee-Moon Jeong; Jong-Up Jeon; Yong-Kweon Kim20032003, vol.12, no.4
A high-sensitivity silicon accelerometer with a folded-electrode structureNavid Yazdi; Khalil Najafi; Arvind S. Salian20032003, vol.12, no.4
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