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期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2012, vol.30, no.1 2012, vol.30, no.2 2012, vol.30, no.3 2012, vol.30, no.4 2012, vol.30, no.5 2012, vol.30, no.6

题名作者出版年年卷期
Degassing a vacuum system with in-situ UV radiationSean R. Koebley; Ronald A. Outlaw; Randy R. Dellwo20122012, vol.30, no.6
Nanoscale photon management in silicon solar cellsSangmoo Jeong; Shuang Wang; Yi Cui20122012, vol.30, no.6
Frequency and electrode shape effects on etch rate uniformity in a dual-frequency capacitive reactorDougyong Sung; Vladimir Volynets; Wonsub Hwang; Yumi Sung; Seokhwan Lee; Myungsun Choi; Gon-Ho Kim20122012, vol.30, no.6
Reaction mechanisms of oxygen plasma interaction with organosilicate low-k materials containing organic crosslinking groupsMrunalkumar Chaudhari; Jincheng Du20122012, vol.30, no.6
Comparison endpoint study of process plasma and secondary electron beam exciter optical emission spectroscopyP. L. Stephan Thamban; Stuart Yun; Gabriel Padron-Wells; Jimmy W. Hosch; Matthew J. Goeckner20122012, vol.30, no.6
Study on breathing mode oscillation suppression of self-excited Hall thrustersWei Liqiu; Han Ke; Wang Chunsheng; Li Hong; Zhang ChaoHai; Yu Daren20122012, vol.30, no.6
Study on the oxidation and reduction of tungsten surface for sub-50 nm patterning processJong Kyu Kim; Seok Woo Nam; Sung Il Cho; Myung S. Jhon; Kyung Suk Min; Chan Kyu Kim; Ho Bum Jung; Geun Young Yeom20122012, vol.30, no.6
Negative oxygen ion formation in reactive magnetron sputtering processes for transparent conductive oxidesThomas Welzel; Klaus Ellmer20122012, vol.30, no.6
New method of calculating adsorption and scattering for Xe-Pt(111) using Direct Simulation Monte Carlo techniquesBrook I. Bentley; Robert B. Greendyke20122012, vol.30, no.6
Friction and counterface wear influenced by surface profiles of plasma electrolytic oxidation coatings on an aluminum A356 alloyJun Feng Su; Xueyuan Nie; Henry Hu; Jimi Tjong20122012, vol.30, no.6
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