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期刊


ISSN0734-2101
刊名Journal of Vacuum Science & Technology
参考译名真空科学与技术，A辑：真空、表面与膜
收藏年代2000～2013



全部

2000 2001 2002 2003 2004 2005
2006 2007 2008 2009 2010 2011
2012 2013

2002, vol.20, no.1 2002, vol.20, no.2 2002, vol.20, no.3 2002, vol.20, no.4 2002, vol.20, no.5 2002, vol.20, no.6

题名作者出版年年卷期
Refractive index control of silicon nitride films prepared by radio-frequency reactive sputteringP. S. Nayar20022002, vol.20, no.6
Low temperature deposition of α-Al{sub}2O{sub}3 thin films by sputtering using a Cr{sub}2O{sub}3 templateP. Jin; G. Xu; M. Tazawa; K. Yoshimura; D. Music; J. Alami; U. Helmersson20022002, vol.20, no.6
High-sensitivity X-ray photoelectron spectroscopy characterization of a quantum device structureM. Wintrebert-Fouquet; K. S. A. Butcher20022002, vol.20, no.6
Effect of surface polymerization on plasma and process stability in polycrystalline-silicon etchingSonglin Xu; Thorsten Lill; Shashank Deshmukh; Olivier Joubert20022002, vol.20, no.6
Conductance calculation of a long tube with equilateral triangle cross sectionPing Fan; Ji-Guo Chu; Jian-Da Shao20022002, vol.20, no.6
Dramatic change of electrical properties in La-Ba-Mn-O thin films prepared using bias sputteringJong Cheol Lee; Sang Yu Ie; Seung Iel Park; Yeongjin Yi; Gyu In Jang; Ho Shik Song; Dong Gyun You; Kwangho Jeong20022002, vol.20, no.6
Plasma-surface kinetics and simulation of feature profile evolution in Cl{sub}2+HBr etching of polysiliconWeidong Jin; Steven A. Vitale; Herbert H. Sawin20022002, vol.20, no.6
Photoelastic modulation-reflection absorption infrared spectroscopy of CO on Pd(111)D. Stacchiola; A. W. Thompson; M. Kaltchev; W. T. Tysoe20022002, vol.20, no.6
Atomic layer deposition of zirconium silicate films using zirconium tetrachloride and tetra-n-butyl orthosilicateWon-Kyu Kim; Sang-Woo Kang; Shi-Woo Rhee; Nae-In Lee; Jong-Ho Lee; Ho-Kyu Kang20022002, vol.20, no.6
Correlation between structure, stress and deposition parameters in direct current sputtered zinc oxide filmsO. Kappertz; R. Drese; M. Wuttig20022002, vol.20, no.6
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