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期刊
ISSN
0734-2101
刊名
Journal of Vacuum Science & Technology
参考译名
真空科学与技术,A辑:真空、表面与膜
收藏年代
2000~2013
全部
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2002, vol.20, no.1
2002, vol.20, no.2
2002, vol.20, no.3
2002, vol.20, no.4
2002, vol.20, no.5
2002, vol.20, no.6
题名
作者
出版年
年卷期
Mass spectrometric studies of low pressure CH{sub}4, CH{sub}4/H{sub}2, and H{sub}2 plasma beams generated by an inductively coupled radio frequency discharge
Katsuyuki Okada; Shojiro Komatsu
2002
2002, vol.20, no.6
Investigation of the hydrogenation properties of Zr films under unclean plasma conditions
L. Q. Shi; G. Q. Yan; J. Y. Zhou; S. Z. Luo; S. M. Peng; W. Ding; X. G. Long
2002
2002, vol.20, no.6
Electron emission suppression characteristics of molybdenum grids coated with carbon film by ion beam assisted deposition
Xianghuai Liu; Congxin Ren; Bingyao Jiang; Hong Zhu Yanyuan Liu; Jingxian Wu
2002
2002, vol.20, no.6
Investigation and simulation of XeF{sub}2 isotropic etching of silicon
Beharaad Bahreyni; C. Shafai
2002
2002, vol.20, no.6
Quantitative analysis of annealing-induced structure disordering in ion-implanted amorphous silicon
Yu-Yin Cheng; J. M. Gibson; P. M. Baldo; B. J. Kestel
2002
2002, vol.20, no.6
Thermal stability of Pr{sub}2O{sub}3 films grown on Si(100) substrate
A. Goryachko; J. P. Liu; D. Kruger; H. J. Osten; E. Bugiel; R. Kurps; V. Melnik
2002
2002, vol.20, no.6
Angle-resolved X-ray photoelectron spectroscopy ultrathin Al{sub}2O{sub}3 films grown by atomic layer deposition
O. Renault; L. G. Gosset; D. Rouchon; A. Ermolieff
2002
2002, vol.20, no.6
Investigation of thermal flux to the substrate during sputter deposition of aluminum
Samuel D. Ekpe; Steven K. Dew
2002
2002, vol.20, no.6
Structural and luminescent properties of ZnTe film grown on silicon by metalorganic chemical vapor deposition
C. X. Shan; X. W. Fan; J. Y. Zhang; Z. Z. Zhang; X. H. Wang; J. G. Ma; Y. M. Lu; Y. C. Liu; D. Z. Shen; X. G. Kong; G. Z. Zhong
2002
2002, vol.20, no.6
Wet chemical etching studies of Zr and Hf-silicate gate dielectrics
M. A. Quevedo-Lopez; M. El-Bouanani; R. M. Wallace; B. E. Gnade
2002
2002, vol.20, no.6
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