先进制造业知识服务平台
国家科技图书文献中心机械分馆　　工信部产业技术基础公共服务平台　　国家中小企业公共服务示范平台

期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2002, vol.11, no.1 2002, vol.11, no.2 2002, vol.11, no.3 2002, vol.11, no.4 2002, vol.11, no.5 2002, vol.11, no.6

题名作者出版年年卷期
Post-CMOS processing for high-aspect-ratio integrated silicon microstructuresHuikai Xie; Lars Erdmann; Xu Zhu; Kaigham J. Gabriel; Gary K. Fedder20022002, vol.11, no.2
Batch mode micro-electro-discharge machiningKen'ichi Takahata; Yogesh B. Gianchandani20022002, vol.11, no.2
Real-time etch-depth measurements of MEMS devicesSylvie Bosch-Charpenay; Jiazhan Xu; John Haigis; Peter A. Rosenthal; Peter R. Solomon; James M. Bustillo20022002, vol.11, no.2
Convective-diffusive mass transfer inside complex micro-molds during electrodepositionWeihua Wang; Steven D. Leith; Daniel T. Schwartz20022002, vol.11, no.2
Plastic deformation of nanometric single crystal silicon wire in AFM bending test at intermediate temperaturesTakahiro Namazu; Yoshitada Isono; Takeshi Tanaka20022002, vol.11, no.2
Optomechanical uncooled infrared imaging system: design, microfabrication, and performanceYang Zhao; Minyao Mao; Roberto Horowitz; Arunava Majumdar; John Varesi; Paul Norton; John Kitching20022002, vol.11, no.2
Integrated microrelays: concept and initial resultsHan-Sheng Lee; Chi H. Leung; Jenny Shi; Shih-Chia Chang; Samuel Lorincz; Iulian Nedelescu20022002, vol.11, no.2
Silicon fabricated submicrometer stepper motor for microsurgical proceduresDavid Peichel; David Marcus; Raed N. Rizq; Aurthur G. Erdman; William P. Robbins; Dennis L. Polla20022002, vol.11, no.2



国家科技图书文献中心  全球文献资源网  京ICP备05055788号-26  机械工业信息研究院 2018-2024