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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2002, vol.11, no.1 2002, vol.11, no.2 2002, vol.11, no.3 2002, vol.11, no.4 2002, vol.11, no.5 2002, vol.11, no.6

题名作者出版年年卷期
Electrothermally activated paraffin microactuatorsEdwin T. Carlen; Carlos H. Mastrangelo20022002, vol.11, no.3
Surface modification with self-assembled monolayers of nanoscale replication of photoplastic MEMSGyu Man Kim; Beomjoon Kim; Maik Liebau; Jurriaan Huskens; David N. Reinhoudt; Jurgen Brugger20022002, vol.11, no.3
Sub-10 cm{sup}3 interferometric accelerometer with nano-g resolutionNin C. Loh; Martin A. Schmidt; Scott R. Manalis20022002, vol.11, no.3
A post-CMOS micromachined lateral accelerometerHao Luo; Gang Zhang; L. Richard Carley; Gary K. Fedder20022002, vol.11, no.3
Voltage and pull-in time in current drive of electrostatic actuatorsJoan Pons-Nin; Angel Rodriguez; Luis M. Castaner20022002, vol.11, no.3
The reliability of microelectromechanical systems (MEMS) in shock environmentsV. T. Srikar; Stephen D. Senturia20022002, vol.11, no.3
Microprobe array with electrical interconnection for thermal imaging and data storageDong-Weon Lee; Takahito Ono; Takashi Abe; Masayoshi Esashi20022002, vol.11, no.3
An electrostatic microactuator system for application in high-speed jetsChunchieh Huang; Christophoros Christophorou; Khalil Najafi; Ahmed Naguib; Hassan M. Ngib20022002, vol.11, no.3
Pressure loss in constriction microchannelsWing Yin Lee; Man Wong; Yitshak Zohar20022002, vol.11, no.3
A Lagrangian approach for electrostatic analysis of deformable conductorsGang Li; N. R. Aluru20022002, vol.11, no.3
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