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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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2006, vol.15, no.1 2006, vol.15, no.2 2006, vol.15, no.3 2006, vol.15, no.4 2006, vol.15, no.5 2006, vol.15, no.6

题名作者出版年年卷期
An Untethered, Electrostatic, Globally Controllable MEMS Micro-RobotBruce R. Donald; Christopher G. Levey; Craig D. McGray; Igor Paprotny; Daniela Rus20062006, vol.15, no.1
Latching Micromagnetic Optical SwitchZhilin Huang; Jim Shen20062006, vol.15, no.1
Scanning Micromirrors Fabricated by an SOI/SOI Wafer-Bonding ProcessLixia Zhou; Joseph M. Kahn; Kristofer S. J. Pister20062006, vol.15, no.1
Robust Design and Model Validation of Nonlinear Compliant MicromechanismsJonathan W. Wittwer; Michael S. Baker; Larry L. Howell20062006, vol.15, no.1
Buckling and Free Oscillations of Composite MicroresonatorsHe Li; B. Balachandran20062006, vol.15, no.1
Built-in Self-Test of MEMS AccelerometersNilmoni Deb; R. D. (Shawn) Blanton20062006, vol.15, no.1
Using Dynamic Voltage Drive in a Parallel-Plate Electrostatic Actuator for Full-Gap Travel Range and PositioningLuis Alexandra Rocha; Edmond Cretu; Reinoud F. Wolffenbuttel20062006, vol.15, no.1
Antistick Postpassivation of High-Aspect Ratio Silicon Molds Fabricated by Deep-Reactive Ion EtchingJ. X. Gao; L. P. Yeo; M. B. Chan-Park; J. M. Miao; Y. H. Yan; J. B. Spn; Y. C. Lam; C. Y. Yue20062006, vol.15, no.1
Electrochemical Process for the Lamination of Magnetic Cores in Thin-Film Magnetic ComponentsMagali Brunei; Terence O'Donnell; Andrew M. Connell; Paul McCloskey; Sean Cian O. Mathuna20062006, vol.15, no.1
Impact Behavior and Energy Transfer Efficiency of Pulse-Driven Bent-Beam Electrothermal ActuatorsYoshinobu Shimamura; Kabir Udeshi; Long Que; Jaehyun Park; Yogesh B. Gianchandani20062006, vol.15, no.1
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